Isolation for reactor for deposition of films onto particles
AssigneeApplied Materials, Inc.
InventorsBrian Hayes Burrows, Sekar Krishnasamy, Ayyanagouda Raravi, Monika Mudalkar, Govindraj Desai, Hemantha Kumar Raju, Basavaraj Pattanshetty, David Masayuki Ishikawa, Visweswaren Sivaramakrishnan, Shrikant Swaminathan, Mario Cambron, Robert Navasca, Miaojun Wang, Jonathan Frankel
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