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US 12,538,780 B2Granted
Isolator
AssigneesKabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
InventorMasaki Yamada
Life of this patent
Estimating the term…
Abstract
An isolator includes a substrate; a first insulating film on the substrate; a second insulating film on the first insulating film, a third insulating film on the second insulating film, a first interconnect in the second insulating film, and first and second coils. The first interconnect has a thickness equal to a film thickness of the second insulating film. The first coil extends in the first and second insulating films. The first coil has a length in the extending direction greater than the thickness of the first interconnect. The third insulating film is provided on the second insulating film, and covers the first interconnect and the first coil. The second coil is provided on the third insulating film, and faces the first coil via the third insulating film.
Claims12
An isolator, comprising:
- a substrate;
- a first insulating film provided on the substrate;
- a second insulating film provided on the first insulating film, the second insulating film including a back surface and a front surface, the back surface facing the first insulating film, a front surface being at a side opposite to the back surface;
- a first interconnect provided in the second insulating film, a thickness of the first interconnect being equal to a film thickness of the second insulating film in a first direction directed toward the second insulating film from the substrate;
- a first coil extending in the second insulating film and the first insulating film, the first coil having a length in the first direction from the front surface of the second insulating film into the first insulating film, the length in the first direction of the first coil being greater than the thickness in the first direction of the first interconnect;
- a third insulating film provided on the second insulating film, the third insulating film covering the first interconnect and the first coil, the third insulating film including a back side and a front side opposite to the back side, the back side of the third insulating film facing the second insulating film;
- a second coil provided at the front side of the third insulating film, the second coil facing the first coil via the third insulating film;
- and
- a fourth insulating film provided between the first insulating film and the second insulating film,
- the first interconnect extending through the second insulating film and contacting the fourth insulating film,
- wherein
- the fourth insulating film is provided without contacting the first coil.
9 more elements
An isolator, comprising:
- a substrate;
- a first insulating film provided on the substrate;
- a second insulating film provided on the first insulating film, the second insulating film including a back surface and a front surface, the back surface facing the first insulating film, a front surface being at a side opposite to the back surface;
- a first interconnect provided in the second insulating film, a thickness of the first interconnect being equal to a film thickness of the second insulating film in a first direction directed toward the second insulating film from the substrate;
- a first coil extending in the second insulating film and the first insulating film, the first coil having a length in the first direction from the front surface of the second insulating film into the first insulating film, the length in the first direction of the first coil being greater than the thickness in the first direction of the first interconnect;
- a third insulating film provided on the second insulating film, the third insulating film covering the first interconnect and the first coil, the third insulating film including a back side and a front side opposite to the back side, the back side of the third insulating film facing the second insulating film;
- and
- a second coil provided at the front side of the third insulating film, the second coil facing the first coil via the third insulating film,
- wherein
- the third insulating film includes a plurality of sub-insulating films stacked in the first direction, and
- one of the sub-insulating films having a film thickness in the first direction greater than film thicknesses in the first direction of other sub-insulating films, the one of the sub-insulating films being different in a composition from the first insulating film and the second insulating film.
8 more elements
An isolator, comprising:
- a substrate;
- a first insulating film provided on the substrate;
- a second insulating film provided on the first insulating film, the second insulating film including a back surface and a front surface, the back surface facing the first insulating film, a front surface being at a side opposite to the back surface;
- a first interconnect provided in the second insulating film, a thickness of the first interconnect being equal to a film thickness of the second insulating film in a first direction directed toward the second insulating film from the substrate;
- a first coil extending in the second insulating film and the first insulating film, the first coil having a length in the first direction from the front surface of the second insulating film into the first insulating film, the length in the first direction of the first coil being greater than the thickness in the first direction of the first interconnect;
- a third insulating film provided on the second insulating film, the third insulating film covering the first interconnect and the first coil, the third insulating film including a back side and a front side opposite to the back side, the back side of the third insulating film facing the second insulating film;
- a second coil provided at the front side of the third insulating film, the second coil facing the first coil via the third insulating film;
- and
- a second interconnect provided in the second insulating film, the second interconnect having a thickness in the first direction equal to the film thickness of the second insulating film;
- and
- an upper layer terminal provided on the front side of the third insulating film, the upper layer terminal being apart from the second coil,
- the second interconnect being provided between the first interconnect and the first coil, the second interconnect being apart from the first interconnect and the first coil,
- the first interconnect being electrically connected to the upper layer terminal via a contact plug extending in the third insulating film.
10 more elements
Dependencies are inferred from the claim text.