Electrostatic chuck heater and manufacturing method therefor

A method of manufacturing an electrostatic chuck heater, the method comprising:

• filling first ceramic powder into a forming mold to form a first ceramic powder layer;
• stacking a ceramic molding body on the first ceramic powder layer, the ceramic molding body including an internal electrode, external electrodes spaced apart from the internal electrode by a predetermined distance, and an external electrode connecting member that is in contact with the external electrodes, the external electrodes including first external electrodes and a second external electrode;
• filling second ceramic powder on the ceramic molding body to form a second ceramic powder layer;
• and
• sintering a ceramic powder layer structure including the ceramic molding body at a predetermined pressure and temperature to form a heater body,
• wherein a manufacturing method of the ceramic molding body includes:
• forming grooves having a predetermined shape in an upper portion of the ceramic powder layer;
• inserting the first external electrodes into the grooves formed in the upper portion of the ceramic powder layer, and filling ceramic powder on the first external electrodes;
• compacting and sintering the ceramic powder layer in which the first external electrodes are embedded to form a ceramic plate;
• processing opposite surfaces of the ceramic plate such that the first external electrodes are exposed to an exterior;
• forming a plurality of grooves in an upper surface of the ceramic plate;
• and
• inserting the internal electrode and the second external electrode into the plurality of grooves.