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US 12,538,748 B2Granted
Ceramic joined body, electrostatic chucking device, and method for producing ceramic joined body
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorsJun Arikawa, Nobuhiro Hidaka, Yukio Miura
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Abstract
A ceramic joined body includes: a pair of ceramic plates; and an electrode layer that is interposed between the pair of ceramic plates, in which the electrode layer is embedded in at least one of the pair of ceramic plates, and in an outer edge of the electrode layer, a joint surface between the at least one of the pair of ceramic plates and the electrode layer has an inclination with respect to a thickness direction of the pair of ceramic plates and the electrode layer.
Claims16
A ceramic joined body comprising:
- a pair of ceramic plates;
- and
- an electrode layer that is interposed between the pair of ceramic plates,
- wherein the electrode layer is formed of an insulating ceramic and a conductive ceramic,
- wherein the electrode layer is embedded in at least one of the pair of ceramic plates, and
- in an outer edge of the electrode layer, a joint surface between the at least one of the pair of ceramic plates and the electrode layer has an inclination with respect to a thickness direction of the pair of ceramic plates and the electrode layer, and
- the outer edge of the electrode layer has a relative density which is lower than that of a center of the electrode,
- wherein materials of the pair of ceramic plates are the same as each other,
- wherein the relative density is a ratio of an area of a region 1 to the total area of an area of the region 1 and an area of a region 2, which is shown in percentage, and
- wherein the region 1 is an area where the conductive ceramic and the insulating ceramic are present, and the a region 2 is an area where the conductive ceramic and the insulating ceramic are not present, and wherein the regions are observed in the electrode layer shown in a microscope image of a cut surface of the ceramic joined body which is cut in the thickness direction.
7 more elements
A ceramic joined body comprising:
- a pair of ceramic plates;
- an electrode layer that is interposed between the pair of ceramic plates;
- and
- an insulating layer that is disposed in a periphery of the electrode layer between the pair of ceramic plates,
- wherein the electrode layer is formed of an insulating ceramic and a conductive ceramic,
- wherein in an outer edge of the electrode layer, a joint surface between the electrode layer and the insulating layer has an inclination with respect to a thickness direction of the pair of ceramic plates, the electrode layer, and the insulating layer, and
- the outer edge of the electrode layer has a relative density which is lower than that of a center of the electrode layer,
- wherein materials of the pair of ceramic plates are the same as each other,
- wherein the relative density is a ratio of an area of a region 1 to the total area of an area of the region 1 and an area of a region 2, which is shown in percentage, and
- wherein the region 1 is an area where the conductive ceramic and the insulating ceramic are present, and the a region 2 is an area where the conductive ceramic and the insulating ceramic are not present, wherein the regions are observed in the electrode layer shown in a microscope image of a cut surface of the ceramic joined body which is cut in the thickness direction.
7 more elements
Dependencies are inferred from the claim text.