Batch substrate treatment apparatus

A substrate treatment apparatus that subjects a substrate to a surface treatment using a treatment fluid, the apparatus comprising:

• a treatment chamber storing the treatment fluid;
• a treatment fluid supplying part supplying the treatment fluid into the treatment chamber;
• a substrate holder holding the substrate and immersing the substrate in the treatment fluid stored in the treatment chamber;
• a tubular bubble supply pipe disposed inside the treatment chamber and supplying, from below the substrate held by the substrate holder, bubbles in the treatment fluid stored in the treatment chamber;
• and
• a lid covering an upper opening of the treatment chamber,
• wherein the lid includes:
• a first sloped surface leading more upward as getting closer to an edge of the lid;
• a second sloped surface leading more upward as getting closer to a center of the lid,
• the lid includes a first lid and a second lid that are openable and closable, and
• each of the first lid and the second lid includes a protrusion shaped like a quadrangular pyramid.