Plasma diagnostic apparatus and operating method thereof
AssigneeSamsung Electronics Co., Ltd.
InventorsHaewook Park, Juhyun Kim, Younsok Choi
Life of this patent
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Abstract
A plasma diagnostic apparatus includes a substrate having at least one probe, a plasma diagnostic circuit mounted on the substrate, configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information, a wireless communication circuit mounted on the substrate and configured to wirelessly transmit the diagnosis result information to an external device, and a battery mounted on the substrate and configured to supply power to the plasma diagnostic circuit and to the wireless communication circuit.
Claims19
A plasma diagnostic apparatus comprising:
- a substrate having at least one probe;
- a plasma diagnostic circuit mounted on the substrate and configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information;
- a wireless communication circuit mounted on the substrate and configured to wirelessly transmit the diagnosis result information to an external device;
- and
- a battery mounted on the substrate and configured to supply a power to the plasma diagnostic circuit and to the wireless communication circuit,
- wherein
- a first probe of the at least one probe is configured to be applied with a periodic electrical signal of a first phase,
- a second probe of the at least one probe is configured to be applied with the periodic electrical signal of a second phase, and
- the first phase and the second phase have a phase difference of 180°.
A plasma diagnostic apparatus implemented in a wafer form and configured to perform the following operations:
- generating a first electrical signal including a first phase and a second electrical signal including a second phase in a signal generator mounted on a substrate;
- applying the generated first electrical signal to a first probe of a plurality of probes and the generated second electrical signal to a second probe of the plurality of probes;
- receiving an electrical signal from the plurality of probes in a plasma diagnostic circuit mounted on the substrate;
- and
- analyzing the received electrical signal using at least one of coherent sampling or a window function in the plasma diagnostic circuit mounted on the substrate,
- wherein the first phase and the second phase have a phase difference of 180°.
A plasma diagnostic apparatus comprising:
- a substrate implemented as a wafer;
- a plurality of probes on the substrate;
- and
- a plasma diagnostic circuit configured to receive an electrical signal corresponding to plasma of a chamber through each of the plurality of probes and to diagnose the electrical signal through at least one of coherent sampling or a window function,
- wherein
- at least one first probe among the plurality of probes is configured to be applied with a periodic electrical signal of a first phase,
- at least one second probe among the plurality of probes is configured to be applied with the periodic electrical signal of a second phase, and
- the first phase and the second phase have a phase difference of 180°.
Dependencies are inferred from the claim text.