Semiconductor device manufacturing system and semiconductor device manufacturing method

A semiconductor device manufacturing method for manufacturing a semiconductor device using a semiconductor manufacturing apparatus, the semiconductor device manufacturing method comprising:

• a step of acquiring a plurality of particle characteristic values for each of a plurality of particles of a sample processed by the semiconductor manufacturing apparatus;
• a step of using stored correlation data for specifying a component of the semiconductor manufacturing apparatus that is correlated with a particle generation based on a ranking of the plurality of particles according to a calculated evaluation value for each of the plurality of particles and the stored correlation data which is stored in a database, wherein each of the calculated evaluation values is determined based on the plurality of acquired particle characteristic values associated with each of the plurality of particles, and a weight assigned to each particle characteristic value, wherein the plurality of acquired particle characteristic values comprises a number of the particle, a composition of the particle, a distribution of the particle with respect to a location on the sample, a shape of the particle, and dimensions of the particle;
• a step of defining a cleaning condition for cleaning the semiconductor manufacturing apparatus based on the specified component and a stored experience value;
• and
• a step of cleaning the semiconductor manufacturing apparatus using the defined cleaning condition, wherein
• the correlation data stored in the database is correlation data between the specified component and a particle characteristic value that was determined for a previous iteration of the particle reduction processing.

A semiconductor device manufacturing system, comprising:

• a semiconductor manufacturing apparatus;
• and
• a platform connected to the semiconductor manufacturing apparatus via a network and
• which is configured to perform particle reduction processing including
• acquiring a plurality of particle characteristic values for each of a plurality of particles of a sample processed by the semiconductor manufacturing apparatus;
• specifying a component of the semiconductor manufacturing apparatus that is correlated with a particle generation based on a ranking of the plurality of particles according to a calculated evaluation value for each of the plurality of particles and the stored correlation data which is stored in a database, wherein each of the calculated evaluation values is determined based on the plurality of acquired particle characteristic values associated with each of the plurality of particles, and a weight assigned to each particle characteristic value, wherein the plurality of acquired particle characteristic values comprises a number of the particle, a composition of the particle, a distribution of the particle with respect to a location on the sample, a shape of the particle, and dimensions of the particle;
• defining a cleaning condition for cleaning the semiconductor manufacturing apparatus based on the specified component and a stored experience value;
• and
• cleaning the semiconductor manufacturing apparatus using the defined cleaning condition, wherein
• the correlation data stored in the database is correlation data between the specified component and a particle characteristic value that was determined for a previous iteration of the particle reduction processing.