US 12,537,163 B2 · Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method

Abstract

A multi-charged particle beam writing apparatus includes a beam forming mechanism to form multi-charged-particle-beams, a block region forming circuit to form plural block regions from an irradiation region of the multi-charged-particle-beams formed by combining plural sub-regions each surrounded by a beam, being different from each other, and plural other beams adjacent to the beam in the multi-charged-particle-beams, and a writing mechanism to perform, using the multi-charged-particle-beams, multiple writing such that irradiation of each block region of the plural block regions is at least performed by any one of writing processing of the multiple writing, and such that each writing processing of the multiple writing is performed to write a writing region of a target object in a manner of covering the writing region without overlapping by, using one of the plural block regions, irradiation of the one of the plural block regions.

Claims10

Dependent claims

A multi-charged particle beam writing apparatus comprising:

a beam forming mechanism configured to form multiple charged particle beams;
a block region forming circuit configured to form a plurality of block regions from an irradiation region of the multiple charged particle beams which is formed by combining a plurality of sub-regions each surrounded by a beam, being different from each other, and a plurality of other beams adjacent to the beam in the multiple charged particle beams;
and
a writing mechanism configured to perform, using the multiple charged particle beams, multiple writing such that irradiation of each block region of the plurality of block regions is at least performed by any one of writing processing of the multiple writing, and such that each writing processing of the multiple writing is performed to write a writing region of a target object in a manner of covering the writing region without overlapping by, using one of the plurality of block regions, irradiation of the one of the plurality of block regions.

1 more element

A multi-charged particle beam writing method comprising:

forming multiple charged particle beams;
forming a plurality of block regions from an irradiation region of the multiple charged particle beams which is formed by combining a plurality of sub-regions each surrounded by a beam, being different from each other, and a plurality of other beams adjacent to the beam of the multiple charged particle beams;
and
performing, using the multiple charged particle beams, multiple writing such that irradiation of each block region of the plurality of block regions is at least performed by any one of writing processing of the multiple writing, and such that each writing processing of the multiple writing is performed to write a writing region of a target object in a manner of covering the writing region without overlapping by, using one of the plurality of block regions, irradiation of the one of the plurality of block regions.

1 more element

Dependencies are inferred from the claim text.

Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method

Life of this patent

Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method

Life of this patent

Abstract

Claims10