Systems and methods for reconstruction of digital holograms
AssigneeOrbotech Ltd.
InventorsYigal Katzir, Boaz Rosenberg, Nir Turko
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AssigneeOrbotech Ltd.
InventorsYigal Katzir, Boaz Rosenberg, Nir Turko
Estimating the term…
A method for reconstructing a digital hologram of a surface having at least one three-dimensional feature thereon, including acquiring a digital hologram of the surface, reconstructing a wavefront based on the digital hologram, generating a phase map of at least a portion of the surface based on the wavefront, the phase map including phase ambiguities, obtaining at least one additional image of the surface, obtaining height data relating to the three-dimensional feature from the at least one additional image of the surface, the height data being obtained with a first precision, resolving the phase ambiguities based on the height data and deriving a height of the at least one three-dimensional feature based on the phase map following the resolving of the phase ambiguities therein, the height being derived with a second precision more precise than the first precision.
A method for reconstructing a digital hologram comprising:
A system for reconstructing a digital hologram comprising:
Dependencies are inferred from the claim text.