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AssigneeASML Netherlands B.V.
InventorsJohannes Petrus Martinus Bernardus Vermeulen, Johannes Adrianus Leonardus De Goeij, René Wilhelmus Antonius Hubertus Leenaars, Bas Jansen, Ron Geeraard Catharina De Bruijn
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A coupling having a variable stiffness is disclosed. The coupling includes: a deformable component and a support being movably arranged with respect to each other, wherein the deformable component includes a viscoelastic material, wherein the support has a recess configured to receive the deformable component, wherein the deformable component is configured to deform in volumetric deformation when, in use, a force is applied to the deformable component, and wherein a shape of the deformable component and a shape of the support are configured such that the variable stiffness gradually increases as a function of an amount of the force. A stage apparatus may have the coupling.
A coupling having a variable stiffness, the coupling comprising:
A stage apparatus comprising:
Dependencies are inferred from the claim text.