Actinic-ray-sensitive or radiation-sensitive resin composition, actinic-ray-sensitive or radiation-sensitive film, method for forming pattern, and method for producing electronic device

An actinic ray-sensitive or radiation-sensitive resin composition comprising:

• (A) a resin having a polarity that increases by an action of an acid;
• and
• (B) a compound that generates an acid upon irradiation with actinic rays or radiation, represented by the following General Formula (I),
• wherein the resin (A) includes a repeating unit represented by the following General Formula (AI),
• in the General Formula (AI),
• RA, RB, and RC each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group, provided that RC may be bonded to ArA to form a ring, in which case RC represents a single bond or an alkylene group,
• LA represents a single bond or a divalent linking group,
• ArA represents an (n+1)-valent aromatic ring group, and in a case where Are is bonded to RC to form a ring, ArA represents an (n+2)-valent aromatic ring group, and
• n represents an integer of 1 to 5,
• in the General Formula (I),
• M1+ and M2+ each independently represent a cation,
• X represents a single bond or an (m+1)-valent linking group,
• A1− and A2− each independently represent an anionic group, and A1− represents a structure different from the anionic group represented by A2−, and
• m represents 1 or 2, and in a case where m represents 2, a plurality of M1+'s may be the same as or different from each other, and in a case where m represents 2, a plurality of A1−'s may be the same as or different from each other,
• provided that a compound (PI) in which M1+ and M2+ of the compound represented by the General Formula (I) are each substituted with a hydrogen atom having an acid dissociation constant a1 of a group represented by HA1 and an acid dissociation constant a2 of a group represented by A2H, the acid dissociation constant a1 is lower than the acid dissociation constant a2, and the acid dissociation constant a1 is −1.5 or more,
• wherein in the General Formula (I), A1− and A2− are each independently a group selected from the group consisting of groups represented by the following General Formulae (B-1) to (B-27),
• in the General Formula (B-1),
• YF1 represents a fluorine atom or a perfluoroalkyl group, and
• Y1 represents a hydrogen atom or a substituent having no fluorine atom,
• in the General Formula (B-2),
• Y2's each independently represent a hydrogen atom or a substituent having no fluorine atom,
• in the General Formula (B-3),
• YF2 represents a fluorine atom or a perfluoroalkyl group,
• Y3 represents a hydrogen atom or a substituent having no fluorine atom, and
• Ra represents an organic group,
• in the General Formula (B-4),
• Y4's each independently represent a hydrogen atom or a substituent having no fluorine atom, and
• Ra1 represents an organic group,
• in the General Formula (B-5),
• YF3 represents a fluorine atom or a perfluoroalkyl group,
• Y5′ represents a hydrogen atom or a substituent having no fluorine atom, and
• Rb represents a hydrogen atom or an organic group,
• in the General Formula (B-6),
• Y6's each independently represent a hydrogen atom or a substituent having no fluorine atom, and
• Rb1 represents a hydrogen atom or an organic group,
• in the General Formula (B-7),
• YF4 represents a fluorine atom or a perfluoroalkyl group,
• Y7 represents a hydrogen atom or a substituent having no fluorine atom, and
• Rc represents an organic group,
• in the General Formula (B-8),
• Y8's each independently represent a hydrogen atom or a substituent having no fluorine atom, and
• Rc1 represents an organic group,
• in the General Formula (B-9),
• YF5 represents a fluorine atom or a perfluoroalkyl group,
• Y9 represents a hydrogen atom or a substituent having no fluorine atom, and
• Rd represents an organic group,
• in the General Formula (B-10),
• Y10's each independently represent a hydrogen atom or a substituent having no fluorine atom, and
• Rd1 represents an organic group,
• in the General Formula (B-12),
• Re represents a hydrogen atom, an organic group, or a halogen atom,
• represents an integer of 1 to 4, and
• in a case where o represents an integer of 2 or more, a plurality of Re's may be the same as or different from each other,
• in the General Formula (B-13),
• YF6 represents a fluorine atom or a perfluoroalkyl group, and
• Y11 represents a hydrogen atom or a substituent having no fluorine atom,
• in the General Formula (B-14),
• Y12's each independently represent a hydrogen atom or a substituent having no fluorine atom,
• in the General Formula (B-15),
• YF7 represents a fluorine atom or a perfluoroalkyl group,
• Y13 represents a hydrogen atom or a substituent having no fluorine atom, and
• Rf represents an organic group,
• in the General Formula (B-16),
• Y14's each independently represent a hydrogen atom or a substituent having no fluorine atom, and
• Rf1 represents an organic group,
• in the General Formula (B-17),
• YF8 represents a fluorine atom or a perfluoroalkyl group,
• Y15 represents a hydrogen atom or a substituent having no fluorine atom,
• Rg represents an organic group, and
• Rh represents an organic group,
• in the General Formula (B-18),
• Y16's each independently represent a hydrogen atom or a substituent having no fluorine atom,
• Rg1 represents an organic group, and
• Rh1 represents an organic group,
• in the General Formula (B-19),
• YF9 represents a fluorine atom or a perfluoroalkyl group, and
• Y17 represents a hydrogen atom or a substituent having no fluorine atom,
• in the General Formula (B-20),
• Y18's each independently represent a hydrogen atom or a substituent having no fluorine atom,
• in the General Formula (B-21),
• YF10 represents a fluorine atom or a perfluoroalkyl group,
• Y19 represents a hydrogen atom or a substituent having no fluorine atom,
• Ri represents an organic group, and
• Rj represents an organic group,
• in the General Formula (B-22),
• Y20's each independently represent a hydrogen atom or a substituent having no fluorine atom,
• Ri1 represents an organic group, and
• Rj1 represents an organic group,
• in the General Formula (B-23),
• Rk represents a hydrogen atom or a substituent having no fluorine atom,
• p represents an integer of 1 to 4, and
• in a case where p represents an integer of 2 or more, a plurality of Rk's may be the same as or different from each other,
• in the General Formula (B-24),
• Rl represents a hydrogen atom, an organic group, or a halogen atom,
• q represents an integer of 1 to 4,
• in a case where q represents an integer of 2 or more, a plurality of RI's may be the same as or different from each other, and
• Rc2 represents an organic group, in the General Formula (B-25),
• YF11's each independently represent a fluorine atom or a perfluoroalkyl group, and
• Rc3 represents an organic group,
• in the General Formula (B-26),
• YF12's each independently represent a fluorine atom or a perfluoroalkyl group, and
• Rd2 represents an organic group,
• in the General Formula (B-27),
• YF13's each independently represent a fluorine atom or a perfluoroalkyl group, and
• in the General Formulae (B-1) to (B-27),
• * represents a bonding position.