Probe system with integrated choke inductor
AssigneeNorthrop Grumman Systems Corporation
InventorJesse H. Gonzales
Life of this patent
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Abstract
The proposed probe wedge or probe card is configured to be used for a wafer probe system to enhance the test process more efficiently. The probe wedge or probe card includes one or more inductive probing needles and one or more conductive probing needles. Each inductive probing needle includes a shaft and a choke inductor integrated with the shaft. The shaft includes a first end section, a second end section, and an intermediate section between the first and second end sections. The first and second end sections are made of an electrically conductive material and the intermediate section is made of an electrically non-conductive material. The choke inductor includes a first terminal connected to the first end section of the shaft and a second terminal connected to the second end section of the shaft.
Claims15
A probe wedge or probe card configured for DC and RF probing tests of devices or integrated circuits, comprising:
- one or more inductive probing needles, wherein each inductive probing needle comprises:
- a shaft comprising a first end section, a second end section, and an intermediate section between the first and second end sections, wherein the first and second end sections are made of an electrically conductive material and the intermediate section is made of an electrically non-conductive material, and wherein the intermediate section is configured to electrically isolate the first and second end sections from each other;
- and
- a choke inductor comprising a first terminal and a second terminal, wherein the first terminal is connected to the first end section of the shaft and the second terminal is connected to the second end section of the shaft.
A wafer probe system card configured for DC and RF probing tests of devices or integrated circuits, comprising:
- a probe machine configured to supply probing signals to inspect one or more devices formed on a wafer;
- and
- a probe wedge or probe card coupled to the probe machine and receiving the probing signals from the probe machine, comprising:
- one or more inductive probing needles, wherein each inductive probing needle comprises:
- a shaft comprising a first end section, a second end section, and an intermediate section between the first and second end sections, wherein the first and second end sections are made of an electrically conductive material and the intermediate section is made of an electrically non-conductive material, and wherein the intermediate section is configured to electrically isolate the first and second end sections from each other;
- and
- a choke inductor comprising a first terminal and a second terminal, wherein the first terminal is connected to the first end section of the shaft and the second terminal is connected to the second end section of the shaft.
Dependencies are inferred from the claim text.