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US 12,535,468 B2Granted
Liquid-chromatography apparatus having diffusion-bonded titanium components
AssigneeWaters Technologies Corporation
InventorTheodore A. Dourdeville
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Abstract
A liquid chromatography apparatus includes a diffusion-bonded separation column comprising a lower substrate comprising titanium, an upper substrate comprising titanium, and a titanium patterned foil disposed between the lower substrate and the upper substrate. The lower substrate, titanium patterned foil, and upper substrate are diffusion bonded together to form a fluid path extending from an inlet port to an outlet port, wherein walls defining the fluid path within the diffusion-bonded separation column include a titanium surface coating.
Claims10
An LC apparatus, comprising:
- a diffusion-bonded separation column comprising a lower substrate comprising titanium, an upper substrate comprising titanium, and a titanium patterned foil disposed between the lower substrate and the upper substrate, the lower substrate, titanium patterned foil, and upper substrate being diffusion bonded together to form a fluid path extending from an inlet port to an outlet port, wherein walls defining the fluid path within the diffusion-bonded separation column include a titanium surface coating comprising at least one of TiN, TiCN, or TiAlN.
Dependencies are inferred from the claim text.