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US 12,535,363 B2Granted
Radical sensor substrate
AssigneeApplied Materials, Inc.
InventorsChuang-Chia Lin, Martin Hilkene, Amir Bayati
Life of this patent
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Abstract
Embodiments disclosed herein include sensor devices. In an embodiment, a sensor device comprises a substrate, a first sensor of a first type on the substrate, where a catalytic layer is provided as at least part of the first sensor, a second sensor of the first type on the substrate and adjacent to the first sensor, and a lid over the substrate, where an opening through the lid is provided over the first sensor and the second sensor.
Claims19
A sensor device, comprising:
- a substrate;
- a first sensor of a first type on the substrate, wherein a catalytic layer is provided as at least part of the first sensor;
- a second sensor of the first type on the substrate and adjacent to the first sensor;
- and
- a lid over the substrate, wherein an opening through the lid is provided over the first sensor and the second sensor, and wherein the catalytic layer of the first sensor is facing toward the opening in the lid.
2 more elements
A sensor device, comprising:
- a substrate;
- a first sensor of a first type on the substrate, wherein a catalytic layer is provided as at least part of the first sensor;
- a second sensor of the first type on the substrate and adjacent to the first sensor;
- a lid over the substrate, wherein an opening through the lid is provided over the first sensor and the second sensor;
- a third sensor of the first type on the substrate, wherein a catalytic layer is provided as at least part of the third sensor, wherein the catalytic layer of the third sensor is different than the catalytic layer of the first sensor;
- and
- a fourth sensor of the first type on the substrate and adjacent to the third sensor, wherein the third sensor and the fourth sensor are raised up from the substrate higher than the first sensor and the second sensor.
4 more elements
Dependencies are inferred from the claim text.