Processing systems, chambers, and related methods including turbines for energy harnessing

A processing system applicable for use in semiconductor manufacturing, comprising:

• a chamber comprising:
• one or more sidewalls at least partially defining an internal volume,
• one or more windows at least partially defining a processing volume of the internal volume,
• one or more heat sources configured to generate heat,
• a liner disposed in the internal volume and lining at least part of one or more sidewalls,
• a substrate support disposed in the internal volume,
• a support shaft coupled to the substrate support;
• a drive system, comprising:
• a rotation motor configured to rotate the support shaft,
• a lift motor configured to raise and lower the support shaft,
• a drive battery configured to supply electrical power to the rotation motor and the lift motor;
• and
• an energy harnessing device configured to harness energy from the support shaft to produce electrical energy, the harnessed energy including kinetic energy of the support shaft when the support shaft is rotating.

A processing system applicable for use in semiconductor manufacturing, comprising:

• a chamber comprising:
• one or more sidewalls at least partially defining an internal volume,
• one or more windows at least partially defining a processing volume of the internal volume,
• one or more heat sources configured to generate heat,
• a liner disposed in the internal volume and lining at least part of one or more sidewalls,
• a substrate support disposed in the internal volume,
• a support shaft coupled to the substrate support;
• a drive system, comprising:
• a rotation motor configured to rotate the support shaft, the rotation motor comprising a first stator in magnetic communication with a first part of the support shaft,
• a lift motor configured to raise and lower the support shaft,
• a drive battery configured to supply electrical power to the rotation motor and the lift motor;
• and
• an energy harnessing device configured to harness energy from the support shaft to produce electrical energy, the energy harnessing device comprising a second stator in magnetic communication with a second part of the support shaft.