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US 12,534,819 B2Granted
Cerium oxide nanoparticles, methods for fabricating the same and methods for fabricating a semiconductor device using the same
AssigneesSamsung Electronics Co., Ltd., Industry-Academic Cooperation Foundation, Yonsei University
InventorsIn Kwon Kim, Kyu Hyoung Lee, Sang Kyun Kim, Chul Oh Park, Min Young Kim, Hyo San Lee
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Abstract
Cerium oxide nanoparticles and methods of fabricating the same are provided. The cerium oxide nanoparticles may be fabricated by a method that may include injecting metal ions into cerium oxide particles and then removing (e.g., desorbing) at least some of the injected metal ions from the cerium oxide particles.
Claims16
A method for fabricating cerium oxide nanoparticles, the method comprising:
- providing a structure that includes a cathode functional layer including cerium oxide particles, an ion generating layer including metal and a separating membrane between the cathode functional layer and the ion generating layer;
- applying a voltage across the cathode functional layer and the ion generating layer, thereby injecting metal ions generated from the ion generating layer into the cathode functional layer;
- and
- cleaning the cathode functional layer to remove at least some of the metal ions from the cathode functional layer.
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A method for fabricating cerium oxide nanoparticles, the method comprising:
- providing a cell that includes a cathode functional layer including cerium oxide particles, an ion generating layer including lithium (Li), and a separating membrane between the cathode functional layer and the ion generating layer;
- applying a voltage to the cell to inject lithium ions into the cathode functional layer;
- separating the cathode functional layer from the cell;
- and
- cleaning the cathode functional layer using an organic solvent.
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Dependencies are inferred from the claim text.