An atomic layer deposition device for uniform coating on an inner surface of a dome shaped surface, comprising a cabin cover (1), a dome shaped heater (2), a hollow dome shaped shell (3), a cover plate (4), a gas extraction plate (5), a disc heater (6), a gas channel member (7), a cylindrical heater (8), a sample support (9), a cabin (10), and a cabin base (11), wherein a first gas inlet (11-1) and a first gas outlet (11-2) are formed in the cabin base (11);
- the gas channel member (7) is cylindrical, a gas inlet passage (7-1) and a gas outlet passage (7-2) are formed in the gas channel member (7) along an axial direction of the gas channel member (7);
- the gas channel member (7) is vertically fixed to an upper surface of the cabin base (11), the gas inlet passage (7-1) in the gas channel member (7) is in communication with the first gas inlet (11-1), and a gas outlet passage (7-2) in the gas channel member (7) is in communication with the first gas outlet (11-2);
- the cylindrical heater (8) is sleeved outside the gas channel member (7);
- the gas extraction plate (5) is disc-shaped, a peripheral edge (5-3) is formed on an upper surface of the gas extraction plate (5) in a circumferential direction of the gas extraction plate (5), a plurality of gas holes (5-4) are formed in the peripheral edge (5-3) in a radial direction of the peripheral edge (5-3), and the plurality of gas holes (5-4) are uniformly distributed in the circumferential direction of the gas extraction plate (5);
- a second gas inlet (5-1) and a second gas outlet (5-2) are formed in the gas extraction plate (5), a flange (5-5) is arranged on a circumference of the second gas inlet (5-1), and an upper surface of the peripheral edge (5-3) and an upper surface of the flange (5-5) are flush with each other;
- the cover plate (4) covers the gas extraction plate (5) and is fixed to the gas extraction plate (5);
- a third gas inlet (4-1) is formed in the cover plate (4), and in communication with the second gas inlet (5-1);
- a gas cavity is enclosed by the peripheral edge (5-3), the flange (5-5) and the cover plate (4);
- the gas extraction plate (5) is fixed to an upper surface of the gas channel member (7), the second gas inlet (5-1) is in communication with the gas inlet passage (7-1) in the gas channel member (7), and the second gas outlet (5-2) is in communication with the gas outlet passage (7-2) in the gas channel member (7);
- the disc heater (6) is arranged on a lower surface of the gas extraction plate (5), the hollow dome shaped shell (3) is fixed to an upper surface of the cover plate (4), and a central gas hole (3-1) is formed in a center of the hollow dome shaped shell (3);
- the sample support (9) is mounted on the cabin base (11), and sleeved outside the gas channel member (7);
- an annular platform (9-1) is formed on a top of the sample support (9), and a dome shaped sample (18) is placed on the annular platform (9-1) and is located above and covers the hollow dome shaped shell (3);
- a ventilation gap is arranged between the dome shaped sample (18) and the hollow dome shaped shell (3), and a further ventilation gap is arranged between the sample support (9) and the cover plate (4) as well as the gas extraction plate (5);
- the cabin (10) is mounted on the cabin base (11), and sleeved outside the sample support (9), a top of the cabin (10) is covered with the cabin cover (1), the dome shaped heater (2) is arranged on a lower surface of the cabin cover (1), and the dome shaped heater (2) covers an upper portion of the dome shaped sample (18).