Infrared cut-off filter, solid-state image sensor filter, solid-state image sensor, and method for producing solid-state image sensor filter
AssigneeToppan Inc.
InventorsReiko Iwata, Yuri Hirai, Hanae Tagami, Takenori Goda, Hiroyuki Chinone
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Abstract
An infrared cut-off filter including a cyanine dye including a tris(pentafluoroethyl) trifluorophosphate anion and a cation having a polymethine and a nitrogen-containing heterocycle located at each end of the polymethine, and an acrylic polymer having a unit structure of formula (1).
Claims20
An infrared cut-off filter, comprising:
- a cyanine dye including a tris(pentafluoroethyl) trifluorophosphate anion and a cation having a polymethine and a nitrogen-containing heterocycle located at each end of the polymethine;
- and
- an acrylic polymer comprising structural units derived from at least one selected from the group consisting of phenoxyethyl (meth)acrylate, phenoxypolyethylene glycol (meth)acrylate, nonylphenoxy polyethylene glycol (meth)acrylate, phenoxypolypropylene glycol (meth)acrylate, 2-(meth)acryloyloxyethyl-2-hydroxypropyl phthalate, 2-hydroxy-3-phenoxypropyl (meth)acrylate, 2-(meth)acryloyl oxyethyl hydrogen phthalate, 2-(meth)acryloyl oxypropyl hydrogen phthalate, ethoxylated ortho-phenyl phenol (meth)acrylate, o-phenyl phenoxyethyl (meth)acrylate, 3-phenoxy benzyl (meth)acrylate, 4-hydroxyphenyl (meth)acrylate, 2-naphthol (meth)acrylate, 4-biphenyl (meth)acrylate, 9-anthrylmethyl (meth)acrylate, 2-[3-(2H-benzotriazole-2-yl)-4-hydroxyphenyl]ethyl (meth)acrylate, phenol ethylene oxide (EO) modified acrylate, nonylphenol EO modified acrylate, 2-(meth)acryloyloxyethyl phthalate, and 2-(meth)acryloyloxyethyl hexahydrophthalate.
An infrared cut-off filter, comprising:
- a cyanine dye including a tris(pentafluoroethyl) trifluorophosphate anion and a cation having a polymethine and a nitrogen-containing heterocycle located at each end of the polymethine;
- and
- an acrylic polymer comprising structural units derived from at least one selected from the group consisting of 4-t-cyclohexyl (meth)acrylate, dicyclopentanyl acrylate, dicyclopentenyl (meth)acrylate, dicyclopentadienyl (meth)acrylate, and tetracyclododecyl (meth)acrylate.
An infrared cut-off filter, comprising:
- a cyanine dye including a tris(pentafluoroethyl) trifluorophosphate anion and a cation having a polymethine and a nitrogen-containing heterocycle located at each end of the polymethine;
- and
- an acrylic polymer comprising structural units derived from at least one selected from the group consisting of 2-methylglycidyl (meth)acrylate, 2-ethylglycidyl (meth)acrylate, 2-oxiranylethyl (meth)acrylate, 2-glycidyloxyethyl (meth)acrylate, 3-glycidyloxypropyl (meth)acrylate, glycidyloxyphenyl (meth)acrylate, oxetanyl (meth)acrylate, 3-methyl-3-oxetanyl (meth)acrylate, 3-ethyl-3-oxetanyl (meth)acrylate, (3-methyl-3-oxetanyl) methyl (meth)acrylate, (3-ethyl-3-oxetanyl) methyl (meth)acrylate, 2-(3-methyl-3-oxetanyl) ethyl (meth)acrylate, 2-(3-ethyl-3-oxetanyl) ethyl (meth)acrylate, 2-[(3-methyl-3-oxetanyl) methyloxy] ethyl (meth)acrylate, 2-[(3-ethyl-3-oxetanyl) methyloxy] ethyl (meth)acrylate, 3-[(3-methyl-3-oxetanyl) methyloxy] propyl (meth)acrylate, 3-[(3-ethyl-3-oxetanyl) methyloxy] propyl (meth)acrylate, and tetrahydrofurfuryl (meth)acrylate.
A method for producing a solid-state image sensor filter, comprising:
- forming an infrared cut-off filter;
- and
- patterning the infrared cut-off filter by dry etching,
- wherein the infrared cut-off filter includes a cyanine dye including a tris(pentafluoroethyl) trifluorophosphate anion and a cation having a polymethine and a nitrogen-containing heterocycle located at each end of the polymethine, and an acrylic polymer comprising structural units derived from at least one selected from the group consisting of phenoxyethyl (meth)acrylate, phenoxypolyethylene glycol (meth)acrylate, nonylphenoxy polyethylene glycol (meth)acrylate, phenoxypolypropylene glycol (meth)acrylate, 2-(meth)acryloyloxyethyl-2-hydroxypropyl phthalate, 2-hydroxy-3-phenoxypropyl (meth)acrylate, 2-(meth)acryloyl oxyethyl hydrogen phthalate, 2-(meth)acryloyl oxypropyl hydrogen phthalate, ethoxylated ortho-phenyl phenol (meth)acrylate, o-phenyl phenoxyethyl (meth)acrylate, 3-phenoxy benzyl (meth)acrylate, 4-hydroxyphenyl (meth)acrylate, 2-naphthol (meth)acrylate, 4-biphenyl (meth)acrylate, 9-anthrylmethyl (meth)acrylate, 2-[3-(2H-benzotriazole-2-yl)-4-hydroxyphenyl]ethyl (meth)acrylate, phenol ethylene oxide (EO) modified acrylate, nonylphenol EO modified acrylate, 2-(meth)acryloyloxyethyl phthalate, and 2-(meth)acryloyloxyethyl hexahydrophthalate.
A method for producing a solid-state image sensor filter, comprising:
- forming an infrared cut-off filter;
- and
- patterning the infrared cut-off filter by dry etching,
- wherein the infrared cut-off filter includes a cyanine dye including a tris(pentafluoroethyl) trifluorophosphate anion and a cation having a polymethine and a nitrogen-containing heterocycle located at each end of the polymethine, and an acrylic polymer comprising structural units derived from at least one selected from the group consisting of 4-t-cyclohexyl (meth)acrylate, dicyclopentanyl acrylate, dicyclopentenyl (meth)acrylate, dicyclopentadienyl (meth)acrylate, and tetracyclododecyl (meth)acrylate.
A method for producing a solid-state image sensor filter, comprising:
- forming an infrared cut-off filter;
- and
- patterning the infrared cut-off filter by dry etching,
- wherein the infrared cut-off filter includes a cyanine dye including a tris(pentafluoroethyl) trifluorophosphate anion and a cation having a polymethine and a nitrogen-containing heterocycle located at each end of the polymethine, and an acrylic polymer comprising structural units derived from at least one selected from the group consisting of 2-methylglycidyl (meth)acrylate, 2-ethylglycidyl (meth)acrylate, 2-oxiranylethyl (meth)acrylate, 2-glycidyloxyethyl (meth)acrylate, 3-glycidyloxypropyl (meth)acrylate, glycidyloxyphenyl (meth)acrylate, oxetanyl (meth)acrylate, 3-methyl-3-oxetanyl (meth)acrylate, 3-ethyl-3-oxetanyl (meth)acrylate, (3-methyl-3-oxetanyl) methyl (meth)acrylate, (3-ethyl-3-oxetanyl) methyl (meth)acrylate, 2-(3-methyl-3-oxetanyl) ethyl (meth)acrylate, 2-(3-ethyl-3-oxetanyl) ethyl (meth)acrylate, 2-[(3-methyl-3-oxetanyl) methyloxy] ethyl (meth)acrylate, 2-[(3-ethyl-3-oxetanyl) methyloxy] ethyl (meth)acrylate, 3-[(3-methyl-3-oxetanyl) methyloxy] propyl (meth)acrylate, 3-[(3-ethyl-3-oxetanyl) methyloxy] propyl (meth)acrylate, and tetrahydrofurfuryl (meth)acrylate.
Dependencies are inferred from the claim text.