Micro-electro-mechanical system (MEMs) devices including sidewall stoppers
AssigneeVanguard International Semiconductor Corporation
InventorsRakesh Chand, Sock Kuan Soo, Muniandy Shunmugam, Ramachandramurthy Pradeep Yelehanka
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Abstract
A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in contact with the cavity. The stopper includes a filling material surrounding a periphery of the cavity, and a liner wrapping around the filling material. The MEMS structure is disposed over the cavity and attached on the stopper and the supporting substrate.
Claims9
A micro-electro-mechanical system (MEMS) device, comprising:
- a supporting substrate;
- a cavity disposed in the supporting substrate;
- a stopper disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper being in contact with the cavity, wherein the stopper comprises:
- a filling material surrounding a periphery of the cavity;
- and
- a liner wrapping around the filling material;
- and
- a MEMS structure disposed over the cavity and attached on the stopper and the supporting substrate,
- wherein the liner extends from a first region at a bottom of the filling material to a second region between a sidewall of the filling material and the supporting substrate and to a third region between another sidewall of the filling material and the cavity.
Dependencies are inferred from the claim text.