Robot with two-axis hand motor

A robot for handling an electronic substrate, the robot comprising:

• an articulated arm comprising a plurality of links connected by a plurality of joints, wherein the plurality of links comprise:
• a first hand and a second hand each of which is configured to support the electronic substrate;
• a base;
• and
• one or more arm links connecting the first hand and the second hand to the base;
• and
• a plurality of motors configured to drive the plurality of joints respectively to change a position and a posture of the first hand and the second hand,
• wherein the plurality of joints comprise a hand joint connecting the first hand and the second hand to an arm link of the one or more arm links,
• wherein the plurality of motors comprise a hand motor configured to independently rotate the first hand and the second hand around a hand axis along a vertical orientation perpendicular to the electronic substrate supported by the first hand or the second hand,
• wherein the hand motor comprises:
• a first output shaft fixed to the first hand;
• a first stator configured to apply a rotating magnetic field around the hand axis on the first output shaft in the arm link;
• a second output shaft extending through the first output shaft and fixed to the second hand;
• a second stator configured to apply a rotating magnetic field around the hand axis on the second output shaft in the arm link;
• a first bearing held by the arm link and holding the second output shaft to rotate around the hand axis;
• a second bearing held by the second output shaft between an outer periphery of the second output shaft and an inner periphery of the first output shaft and holding the first output shaft to rotate around the hand axis;
• and
• a third bearing held by the arm link and holding the first output shaft to rotate around the hand axis,
• wherein the first output shaft comprises a first rotor facing the first stator along the hand axis and receiving a rotating magnetic field from the first stator, and
• wherein the second output shaft comprises a second rotor facing the second stator along the hand axis and receiving a rotating magnetic field from the second stator, and
• wherein, in an orientation along the hand axis,
• the first stator is located between the second stator and both the first hand and the second hand,
• the first rotor and the second rotor are located between the first bearing and the third bearing, and
• the third bearing is located between the first bearing and the second bearing.

A robot comprising:

• an articulated arm comprising a plurality of links connected by a plurality of joints, wherein the plurality of links comprise:
• a first hand and a second hand;
• a base;
• and
• one or more arm links connecting the first hand and the second hand to the base;
• and
• a plurality of motors configured to drive the plurality of joints respectively to change a position and a posture of the first hand and the second hand,
• wherein the plurality of joints comprise a hand joint connecting the first hand and the second hand to an arm link of the one or more arm links,
• wherein the plurality of motors comprise a hand motor configured to independently rotate the first hand and the second hand around a hand axis, and
• wherein the hand motor comprises:
• a first output shaft fixed to the first hand;
• a first stator configured to apply a rotating magnetic field around the hand axis on the first output shaft in the arm link, wherein the first output shaft comprises a first rotor facing the first stator in a radial direction perpendicular to the hand axis and receiving the rotating magnetic field from the first stator;
• a second output shaft extending through the first output shaft and fixed to the second hand;
• a second stator configured to apply a rotating magnetic field around the hand axis on the second output shaft in the arm link, wherein the second output shaft comprises a second rotor facing the second stator in the radial direction and receiving the rotating magnetic field from the second stator;
• a fixed shaft fixed to the arm link and inserted into the second output shaft along the hand axis;
• a first bearing held by the fixed shaft between an outer periphery of the fixed shaft and an inner periphery of the second output shaft, and holding the second output shaft to rotate around the hand axis;
• and
• a second bearing held by the second output shaft between an outer periphery of the second output shaft and an inner periphery of the first output shaft, and holding the first output shaft to rotate around the hand axis.

A robot for handling an electronic substrate, the robot comprising:

• an articulated arm comprising a plurality of links connected by a plurality of joints, wherein the plurality of links comprise:
• a first hand and a second hand each of which is configured to support the electronic substrate;
• a base;
• and
• one or more arm links connecting the first hand and the second hand to the base;
• and
• a plurality of motors configured to drive the plurality of joints respectively to change a position and a posture of the first hand and the second hand,
• wherein the plurality of joints comprise a hand joint connecting the first hand and the second hand to an arm link of the one or more arm links,
• wherein the articulated arm further comprises a frame located between the arm link and both the first hand and the second hand,
• wherein the frame is detachably attached to the arm link,
• wherein the first stator is fixed to the arm link via the frame,
• wherein the second stator is directly fixed to the arm link,
• wherein the plurality of motors comprise a hand motor configured to independently rotate the first hand and the second hand around a hand axis along a vertical orientation perpendicular to the electronic substrate supported by the first hand or the second hand, and
• wherein the hand motor comprises:
• a first output shaft fixed to the first hand;
• a first stator configured to apply a rotating magnetic field around the hand axis on the first output shaft in the arm link, wherein the first output shaft comprises a first rotor facing the first stator along the hand axis and receiving a rotating magnetic field from the first stator;
• a second output shaft extending through the first output shaft and fixed to the second hand;
• a second stator configured to apply a rotating magnetic field around the hand axis on the second output shaft in the arm link, wherein the second output shaft comprises a second rotor facing the second stator along the hand axis and receiving a rotating magnetic field from the second stator;
• a first bearing held by the arm link and holding the first output shaft or the second output shaft to rotate around the hand axis;
• and
• a second bearing held by the second output shaft between an outer periphery of the second output shaft and an inner periphery of the first output shaft, to hold the first output shaft to rotate around the hand axis.