Metallic sealants in transistor arrangements
AssigneeIntel Corporation
InventorsAbhishek A. Sharma, Tahir Ghani, Jack T. Kavalieros, Gilbert W. Dewey, Van H. Le, Lawrence D. Wong, Christopher J. Jezewski
Life of this patent
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Abstract
Disclosed herein are transistor electrode-channel arrangements, and related methods and devices. For example, in some embodiments, a transistor electrode-channel arrangement may include a channel material, source/drain electrodes provided over the channel material, and a sealant at least partially enclosing one or more of the source/drain electrodes, wherein the sealant includes one or more metallic conductive materials.
Claims23
An integrated circuit (IC) device, comprising:
- a semiconductor material;
- a transistor comprising an electrode and a gate stack, wherein the electrode is a source electrode or a drain electrode of the transistor, and wherein the gate stack includes a gate dielectric and a gate electrode material;
- and
- a sealant, wherein at least 80% of the sealant is amorphous, and wherein the electrode is between the semiconductor material and at least a portion of the sealant.
An integrated circuit (IC) device, comprising:
- a transistor comprising a region, wherein the region is either a source region or a drain region of the transistor;
- an electrode coupled to the region;
- a layer comprising two or more layers of different metallic conductive materials, wherein at least a portion of the layer is in physical contact with at least a portion of the electrode, and the layer includes an amorphous material;
- and
- a semiconductor material, wherein the electrode is between the semiconductor material and at least a portion of the layer.
An integrated circuit (IC) device, comprising:
- a transistor comprising an electrode and a gate stack, wherein the electrode is a source electrode or a drain electrode of the transistor, and wherein the gate stack includes a gate dielectric and a gate electrode material;
- and
- a layer adjacent to the electrode, wherein at least 80% of the layer is amorphous, at least a portion of the layer is in physical contact with at least a portion of the electrode, and the layer wraps around at least a portion of the electrode.
Dependencies are inferred from the claim text.