Miniaturized integrated cyclotron

Abstract

An electronic device includes a first resonator electrode and a second resonator electrode in an interconnect stack over a semiconductor substrate. The first resonator electrode includes a first lower resonator electrode, a first upper resonator electrode and a first plurality of vias between the first lower resonator electrode and the first upper resonator electrode. The second resonator electrode includes a second lower resonator electrode, a second upper resonator electrode, and a second plurality of vias between the second lower resonator electrode and the second upper resonator electrode. A cavity in the interconnect stack is bounded by the first resonator electrode and the second resonator electrode. An electron emitter extends from the semiconductor surface between the first and second resonator electrodes and is configured to direct electrons into the cavity. The electronic device may be operated to produce short wavelength radiation, e.g. x-rays.

Dependencies are inferred from the claim text.