Bulk acoustic wave based clocks for timing devices
AssigneeChorusview, Inc.
InventorsDean Mamoru Kawaguchi, Edward Maurice Farrell
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Abstract
Aspects of the disclosure provide a method of using a bulk acoustic wave (BAW) based clock. For example, a first burst pulse of ultrasonic waves may be received by a transmit transducer of a BAW delay device. A feedthrough pulse from the first burst pulse may be received at a receive transducer of the BAW delay device. After receiving the feedthrough pulse, a first echo pulse from the first burst pulse may be received at the receive transducer. The first pulse may be a reflection of a portion of the first burst pulse from a substrate. A difference in time between the receipt of the feedthrough pulse and the receipt of the first echo pulse may be used to control timing of a second burst pulse of ultrasonic waves.
Claims18
A method comprising:
- transmitting, a first burst pulse of ultrasonic waves, by a transmit transducer of a bulk-acoustic wave (BAW) delay device;
- receiving a feedthrough pulse of the first burst pulse at a receive transducer of the BAW delay device;
- after receiving the feedthrough pulse, receiving a first echo pulse of the first burst pulse at the receive transducer, the first echo pulse being a reflection of a portion of the first burst pulse from a substrate;
- and
- using a difference in time between the receipt of the feedthrough pulse and the receipt of the first echo pulse to control timing of a second burst pulse of ultrasonic waves.
A system comprising:
- a substrate;
- a complementary metal-oxide semiconductor (CMOS) stack on which the substrate is arranged;
- and
- a bulk acoustic wave (BAW) delay device, the CMOS stack being arranged at least partially between the substrate and the BAW delay device, the BAW delay device including:
- a transmit transducer configured to transmit a first burst pulse of ultrasonic waves, and
- a receive transducer configured to receive a feedthrough pulse of the first burst pulse and after receiving the feedthrough pulse, receive a first echo pulse of the first burst pulse, the first echo pulse being a reflection of a portion of the first burst pulse from an edge of the substrate;
- and
- a state machine configured to a difference in time between the receipt of the feedthrough pulse and the receipt of the first echo pulse to control timing of a second burst pulse of ultrasonic waves.
Dependencies are inferred from the claim text.