Porous distributed Bragg reflector apparatuses, systems, and methods
AssigneeIQE plc
InventorMatthew Geen
Life of this patent
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Abstract
A layered structure includes a first layer being a single material and a cavity coupled to the first layer. The first layer includes a porous region to form a first distributed Bragg reflector (DBR). The porous region includes alternating first porous and second porous sublayers of the single material to form the first DBR. The cavity includes an active region to generate radiation, detect radiation, or both. Advantageously, the layered structure and method of forming the layered structure improves the speed of manufacturing DBRs, reduces strain in the layered structure, reduces the size of the layered structure, and increases throughput.
Claims14
A method of forming a layered structure, the method comprising:
- forming a layer over a monolithic substrate, the monolithic substrate being a single material, wherein the layer is coupled to the monolithic substrate, the layer comprising an active region to generate radiation or detect radiation;
- and thereafter
- porosifying the monolithic substrate to form a porous region to form a first distributed Bragg reflector (DBR), the porous region comprising alternating first porous and second porous sublayers of the single material to form the first DBR,
- wherein the alternating first porous and second porous sublayers have different porosities.
Dependencies are inferred from the claim text.