Active charge bleed methods for MEMS switches

A microelectromechanical systems (MEMS) device comprising:

• a MEMS switch;
• a circuit node electrically connected to a side of the MEMS switch;
• a resistive charge bleed circuit comprising a switchable device and a resistor monolithically integrated with the MEMS switch, the resistive charge bleed circuit connecting the circuit node to a fixed electric potential;
• and
• control circuitry configured to maintain the switchable device coupled to the fixed electric potential when the MEMS switch is in a conductive state.

A method of operating a microelectromechanical systems (MEMS) device comprising a MEMS switch, the method comprising:

• decoupling a side of the MEMS switch from a fixed electric potential by interrupting a resistive charge bleed circuit, wherein interrupting the charge bleed circuit comprises turning off a switchable device;
• at a first time, turning on the MEMS switch;
• and
• at a second time subsequent to the first time, turning off the MEMS switch,
• wherein, during at least a time interval defined between the first time and the second time, the side of the MEMS switch is decoupled from the fixed electric potential;
• and
• wherein the resistive charge bleed circuit comprises a resistor monolithically integrated with the MEMS switch.