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US 12,529,957 B2Granted
Salt, acid generator, resin, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsMasahiko Shimada, Koji Ichikawa
Life of this patent
Estimating the term…
Abstract
A salt represented by formula (I), a resin comprising a structural unit derived from the salt represented by formula (I), a resit composition comprising the salt represented by formula (I) or a resin comprising a structural unit derived from the salt represented by formula (I).
Claims20
A salt represented by formula (I):
- wherein, in formula (I),
- R4, R5, R6, R7, R8 and R9 each independently represent a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms and selected from an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a group combining an alkanediyl group and a cycloaliphatic hydrocarbon group, or a group combining an alkanediyl group and an aromatic hydrocarbon group, each of the hydrocarbon group may have a substituent, and a —CH2-included in each of the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- A1, A2 and A3 each independently represent a hydrocarbon group having 1 to 20 carbon atoms, each of the hydrocarbon group may have a substituent, and a —CH2— included in each of the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- m1 represents an integer of 0 to 5, and when m1 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m2 represents an integer of 0 to 4, and when m2 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m3 represents an integer of 0 to 4, and when m3 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m4 represents an integer of 0 to 5, and when m4 is 2 or more, a plurality of R4 may be the same or different from each other,
- m5 represents an integer of 0 to 5, and when m5 is 2 or more, a plurality of R5 may be the same or different from each other,
- m6 represents an integer of 0 to 5, and when m6 is 2 or more, a plurality of R6 may be the same or different from each other,
- m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R7 may be the same or different from each other,
- m8 represents an integer of 0 to 4, and when m8 is 2 or more, a plurality of R8 may be the same or different from each other,
- m9 represents an integer of 0 to 4, and when m9 is 2 or more, a plurality of R9 may be the same or different from each other,
- in which 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4,
- at least one of m1, m2 and m3 represents an integer of 1 or more, and when m1 is an integer of 1 or more, at least one of m4 is an integer of 1 or more;
- when m2 is an integer of 1 or more, at least one of m5 is an integer of 1 or more;
- when m3 is an integer of 1 or more, at least one of m6 is an integer of 1 or more,
- X4 represents a single bond, —CH2—, —O—, —S—, —CO—, —SO— or —SO2—,
- Qb1 and Qb2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms,
- Lb1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, a —CH2— included in the divalent saturated hydrocarbon group may be replaced by —O— or —CO—, and a hydrogen atom included in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group,
- Yb1 represents a single bond or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and a —CH2— included in the alicyclic hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- Rbb1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
- X10 represents a single bond, *—O—**, *—CO—O—**, *—O—CO—O—** or *-Ax-Ph-Ay-**,
- Ph represents a phenylene group which may have a substituent,
- Ax represents one group selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonic acid ester bond,
- Ay represents one bond species selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonic acid ester bond,
- * represents a bonding site to carbon atoms to which —Rbb1 is bonded, and ** represents a bonding site to L10, and
- L10 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and a —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—.
24 more elements
A salt represented by formula (I):
- wherein, in formula (I),
- R4, R5, R6, R7, R8 and R9 each independently represent a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms and selected from an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a group combining an alkanediyl group and a cycloaliphatic hydrocarbon group, or a group combining an alkanediyl group and an aromatic hydrocarbon group, each of the hydrocarbon group may have a substituent, and a —CH2— included in each of the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- A1, A2 and A3 each independently represent a hydrocarbon group having 1 to 20 carbon atoms, each of the hydrocarbon group may have a substituent, and a —CH2— included in each of the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—, at least one —CH2— included in the each of the hydrocarbon group is not replaced by —O—, —CO—, —S— or —SO2—,
- m1 represents an integer of 0 to 5, and when m1 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m2 represents an integer of 0 to 4, and when m2 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m3 represents an integer of 0 to 4, and when m3 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m4 represents an integer of 0 to 5, and when m4 is 2 or more, a plurality of R4 may be the same or different from each other,
- m5 represents an integer of 0 to 5, and when m5 is 2 or more, a plurality of R5 may be the same or different from each other,
- m6 represents an integer of 0 to 5, and when m6 is 2 or more, a plurality of R6 may be the same or different from each other,
- m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R7 may be the same or different from each other,
- m8 represents an integer of 0 to 4, and when m8 is 2 or more, a plurality of R8 may be the same or different from each other,
- m9 represents an integer of 0 to 4, and when m9 is 2 or more, a plurality of R9 may be the same or different from each other,
- in which 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4,
- at least one of m1, m2 and m3 represents an integer of 1 or more,
- X4 represents a single bond, —CH2—, —O—, —S—, —CO—, —SO— or —SO2—,
- Qb1 and Qb2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms,
- Lb1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, a —CH2— included in the divalent saturated hydrocarbon group may be replaced by —O— or —CO—, and a hydrogen atom included in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group,
- Yb1 represents a single bond or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and a —CH2— included in the alicyclic hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- Rbb1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
- X10 represents a single bond, *—O—**, *—CO—O—**, *—O—CO—O—** or *-Ax-Ph-Ay-**,
- Ph represents a phenylene group which may have a substituent,
- Ax represents one group selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonic acid ester bond,
- Ay represents one bond species selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonic acid ester bond,
- * represents a bonding site to carbon atoms to which —Rbb1 is bonded, and ** represents a bonding site to L10, and
- L10 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and a —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—.
22 more elements
Dependencies are inferred from the claim text.