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US 12,529,841 B2Granted
Electro-optic device
AssigneeTDK Corporation
InventorsHiroshi Take, Kenji Nagase, Anthony Reymund Melad Binarao, Cheng Bu Heng
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Abstract
An electro-optic device which is provided with: a substrate, an optical waveguide formed on the substrate, and an upper electrode formed on the optical waveguide. The electro-optic device is further provided with a buffer layer formed between the substrate and the upper electrode, and a boundary portion of the optical waveguide and the buffer layer forms an oxide layer different from the optical waveguide and the buffer layer in composition.
Claims6
An electro-optic device, comprising:
- a substrate, an optical waveguide formed on the substrate, and an upper electrode formed on the optical waveguide,
- the electro-optic device further comprising a buffer layer formed between the substrate and the upper electrode, and
- a boundary portion of the optical waveguide and the buffer layer forming an oxide layer different from the optical waveguide and the buffer layer in composition,
- wherein the oxide layer is a single-element oxide, and is amorphous, and
- wherein the buffer layer is a M-Si—O type, wherein M is at least one of Al, Zr, Hf, La, Ba, Bai, Ti, Ca, Mo and In.
2 more elements
Dependencies are inferred from the claim text.