Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow
AssigneeIchor Systems, Inc.
InventorsStephen Carson, Randolph Treur
Life of this patent
Estimating the term…
Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal retainers may be used to retain the seals during assembly of fluid flow components into apparatus for controlling flow.
Claims16
A seal retainer for retaining a seal, the seal retainer comprising:
- a sheet body, the sheet body comprising:
- a first axis;
- a second axis perpendicular to the first axis;
- a first portion, the first axis coplanar with the first portion, the first portion elongate in a direction of the first axis and extending from the second axis along the first axis;
- and
- a second portion, the second portion extending along the second axis and having a seal retaining feature, the seal retaining feature comprising an aperture configured to receive the seal, the aperture being defined by a lateral perimeter, the second portion comprising an exit path extending in a lateral direction from the aperture to the a perimeter edge of the second portion, the lateral exit path configured for lateral detachment of the seal from the seal retainer, the exit path comprising a frangible zone configured to easily break to allow the seal retainer to be moved laterally relative to and detached from the seal in the lateral direction.
A fluid flow component assembly, comprising:
- a fluid flow component comprising a seal cavity;
- an alignment feature configured to be in contact with the fluid flow component;
- a seal configured to engage the seal cavity;
- and
- a seal retainer configured to releasably engage the alignment feature, wherein the seal retainer comprises:
- a seal opening, wherein the seal is releasably seated in the seal opening;
- a lateral perimeter extending around the seal opening;
- and
- a lateral exit path extending from the seal opening to the lateral perimeter and comprising a frangible zone,
- wherein the seal retainer is positionable relative to the seal cavity so that the seal can be positioned in contact with the seal cavity by the seal retainer, wherein the seal retainer is configured to be laterally detached from the seal while the seal is in contact with the seal cavity, and wherein the seal is capable of laterally passes through the lateral exit path when the seal retainer is moved laterally away from the seal and away from the seal cavity via the frangible zone easily breaking and without removing the seam from the seal cavity.
A seal retainer for retaining a seal, the seal retainer comprising:
- a sheet body, the sheet body comprising:
- a first portion extending along a first axis, the first axis defining a plane, the first portion being elongate in a direction of the first axis, the first portion comprising a handle;
- a second portion extending along a second axis, the second axis being perpendicular to the first axis, the second portion being perpendicular to and out of plane with the first portion;
- and
- a seal retaining feature formed into the second portion, the seal retaining feature being configured to releasably hold a seal via a frangible zone located in a lateral direction thereof, and the frangible zone being configured to break when the seal retainer is moved laterally away from the seal,
- wherein the first portion is substantially larger than the second portion.
Dependencies are inferred from the claim text.