Method and apparatus for forming films on particles of powder

An apparatus for forming films on particles of powder, comprising:

• a jet nozzle that accelerates a gas to supersonic speed to create a negative pressure that sucks in the particles of powder, mixes the particles of powder and the supersonic gas inside a jet nozzle, ejects the supersonic jet stream of the particles of powder and the gas, and diffuses the particles of powder using the supersonic jet stream;
• a raw material gas source that supplies a raw material gas;
• an atmospheric pressure plasma source that generates a reaction gas activated by atmospheric pressure plasma;
• a reaction container that includes a peripheral wall having a circular-shaped cross section in plan view, and includes a powder lead-in port, a raw material gas lead-in port and an atmospheric pressure plasma flow lead-in port that are arranged in the reaction container and are formed along a direction intersecting at a fixed angle with the radial direction of the reaction container,
• wherein the films are formed on diffused particles of powder by reaction of the raw material gas and the activated reaction gas in the reaction container,
• wherein the jet nozzle, the raw material gas source, and the atmospheric pressure plasma source cause the diffused particles of powder, the raw material gas, and the reaction gas activated by the atmospheric plasma, respectively, to be led in via the powder lead-in port, the raw material gas lead-in port and the atmospheric pressure plasma flow lead-in port, thereby forming a swirl flow in the reaction container.