Microelectromechanical system and method for manufacturing a microelectromechanical system

A microelectromechanical system, comprising:

• a substrate having a major plane of extension;
• a mass structure formed to be movable relative to the substrate in a vertical direction, perpendicularly to the major plane of extension, the mass structure including an electrode structure;
• wherein the substrate includes a counter-electrode structure, the electrode structure and the counter-electrode structure being coupled capacitively, and wherein the mass structure has a deformation in a resting state of the microelectromechanical system, the electrode structure and/or the counter-electrode structure being formed as a function of the deformation already present in the resting state of the mass structure,
• wherein the mass structure is formed with the deformation in such a manner, that in a state of maximum deflection of the mass structure and/or in the resting state of the microelectromechanical system, the mass structure is a shorter distance from the substrate in a first region than in a second region, the electrode structure and/or the counter-electrode structure being formed as a function of the deformation of the mass structure in such a manner that:
• the electrode structure has a recess in the first region, and/or in the vertical direction, the electrode structure has a lower thickness in the first region than in the second region, and/or
• the counter-electrode structure has a recess in the first region, and/or in the vertical direction, the counter-electrode structure has a lower thickness in the first region than in the second region.