Liquid ejecting head and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsMasanori Mikoshiba, Motoki Takabe, Harunobu Koike, Kei Kiyose, Yasuhiro Itayama
Life of this patent
Estimating the term…
Loading patent…
AssigneeSeiko Epson Corporation
InventorsMasanori Mikoshiba, Motoki Takabe, Harunobu Koike, Kei Kiyose, Yasuhiro Itayama
Estimating the term…
A liquid ejecting head includes a substrate having pressure chambers in communication with nozzles through which a liquid is ejected, a vibration plate on the substrate, and a piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode stacked in a first direction on the vibration plate. The piezoelectric layer of the piezoelectric actuator has an active portion that overlaps the pressure chamber, the first electrode, and the second electrode when viewed in the first direction and a non-active portion that does not overlap at least one of the first electrode and the second electrode when viewed in the first direction. A piezoelectric material forming the piezoelectric layer has a larger crystal grain size in the non-active portion than in the active portion.
A liquid ejecting head comprising:
Dependencies are inferred from the claim text.