Linear robot arm with multiple end effectors

A substrate transport apparatus comprising:

• a first shuttle comprising a first scara arm;
• a first end effector coupled to the first shuttle, where the first end effector comprises a first section configured to carry a first substrate and a second section configured to carry a second substrate, where the second section is laterally spaced from the first section;
• a second shuttle comprising a second scara arm and a third scara arm;
• a second end effector coupled to the second scara arm, where the second end effector comprises a third section configured to carry a third substrate;
• a third end effector coupled to the third scara arm, where the third end effector comprises a fourth section configured to carry a fourth substrate, where the fourth section is laterally spaced from the third section;
• and
• a drive coupled to the first and second shuttles, where the drive is configured to move the first and second shuttles to linearly move the first, second and third end effectors, where the drive and the first and second shuttles are configured to linearly move the first, second and third end effectors with the second and third end effectors being moved independently relative to movement of the first end effector, where the drive comprises a first coaxial drive shaft connected to the first scara arm and a second coaxial drive shaft connected to the second and third scara arms, and where the first scara arm is attached to a first fork member of the first end effector at a location between the first and second sections of the first end effector.

A substrate transport apparatus comprising:

• a first shuttle, where the first shuttle comprises a first scara arm mounted to a support structure;
• a first end effector coupled to the first scara arm;
• a second shuttle, where the second shuttle comprises two second scara arms mounted to the support structure;
• a second end effector coupled to a first one of the second scara arms;
• a third end effector coupled to a second one of the second scara arms;
• and
• a drive coupled to the first and second shuttles, where the drive is configured to move the first and second shuttles to linearly move the end effectors, where the drive and the first and second shuttles are configured to linearly move the second and third end effectors independent from movement of the first end effector,
• where the first scara arm is rotatably connected to the support structure at a first location, where the two second scara arms are rotatably mounted to the support structure at respective second and third locations with respective axes of rotation on opposite sides of the first location, and where the first location is located between the second and third locations.