Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing
AssigneeApplied Materials, Inc.
InventorsSurajit Kumar, Hui Chen, Chih Chung Chou, Shou-Sung Chang
Life of this patent
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Abstract
A chemical mechanical polishing system includes a platen to support a polishing pad having a polishing surface, and a pad cooling assembly. The pad cooling assembly has an arm extending over the platen, a nozzle suspended by the arm and coupled to a source of coolant fluid, the nozzle positioned to spray coolant fluid from the source onto the polishing surface of the polishing pad, and an opening in the arm adjacent the nozzle and a passage extending in the arm from the opening, the opening positioned sufficiently close to the nozzle that a flow of coolant fluid from the nozzle entrains air from the opening.
Claims20
A chemical mechanical polishing system, comprising:
- a platen to support a polishing pad having a polishing surface;
- and
- a pad cooling assembly including
- an arm extending over the platen, wherein the arm comprises a support plate having an aperture therethrough,
- a nozzle supported by the arm above the support plate and coupled to a source of coolant fluid, the nozzle positioned to spray coolant fluid from the source through the aperture onto the polishing surface of the polishing pad, and
- a gap between an inner surface of the aperture and the nozzle such that a flow of coolant fluid from the nozzle entrains air from the gap.
A chemical mechanical polishing system, comprising:
- a platen to support a polishing pad having a polishing surface;
- and
- a pad cooling assembly including
- an arm extending over the platen, wherein the arm comprises a support plate having an aperture therethrough,
- a nozzle supported by the arm above the support plate and coupled to a source of coolant fluid, the nozzle positioned to spray coolant fluid from the source through the aperture onto the polishing surface of the polishing pad, and
- a passage through the support plate from the aperture such that a flow of coolant fluid from the nozzle entrains air from the passage.
Dependencies are inferred from the claim text.