Optical device for shaping an electromagnetic wave beam and use thereof, beam treatment device and use thereof, and beam treatment method

An optical device for shaping an electromagnetic wave beam, the beam being generated by a source and having a beam propagation direction and a focal point, comprising:

• an optical element positioned within beam propagation direction and being transparent to the beam propagating in the beam propagation direction,
• a control unit;
• and
• an exciter means functionally connected to the optical element, wherein the exciter means is controlled by the control unit to move the optical element in a repetitive pattern to induce a focal point oscillation, which is an oscillation of the focal point in at least one of an x direction and a y direction of an x-y plane that is perpendicular to the beam propagation direction, along a controllable focal point oscillation path, the x and y directions being non-parallel to each other, wherein
• the exciter means has at least a first exciter unit for inducing oscillation of the focal point in the x direction and at least a second exciter unit for inducing oscillation of the focal point in the y direction, the control unit being configured to control the first exciter unit and the second exciter unit to control oscillation of the focal point in the x direction and the y direction to increase a beam waist of the beam and increase a beam parameter product (BPP), and
• the first exciter unit and the second exciter unit acting on the optical element, the optical element being the same for first exciter unit and the second exciter unit, and
• the functional connection of the optical element to the exciter means is for inducing an oscillating repetitive movement exclusively of the optical element effecting movement of the focal point,
• wherein, the amplitudes of the focal point oscillation excitable by the exciter means in at least one of the x direction and the y direction are equal to or smaller than +/−1 mm.