Wire guide module, and ultrasonic wire bonder therewith
OwnerAndreas Unger, Frank Walther +2inventors
InventorsAndreas Unger, Frank Walther, Michael Broekelmann, Matthias Hunstig
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Abstract
A wire guide module for an ultrasonic wire bonder, comprising a body made of a thermally stable metallic and/or ceramic material, wherein an elongated wire feed-through channel having a wire inlet opening and having a wire outlet opening is provided on the body, and comprising a guide tube provided in the wire feed-through channel. In addition, the invention relates to a thermosonic wire bonder having a wire guide module.
Claims15
A wire guide module for an ultrasonic wire bonder, the wire guide module comprising:
- a body made of a thermally stable metallic and/or ceramic material;
- an elongated wire feed-through channel provided in the body, the wire feed-through channel having a wire inlet opening and a wire outlet opening;
- and
- a guide tube arranged in the wire feed-through channel,
- wherein, with respect to a feed-through direction of a bond wire in the wire feed-through channel, a downstream distal end of the guide tube terminates upstream of the wire outlet opening, and
- wherein the body has an installation recess, the installation recess being an opening that is provided in addition to the wire inlet opening and the wire outlet opening and that exposes a part of the wire feed-through channel to aid with installation of the guide tube in the wire feed-through channel.
A wire guide module for an ultrasonic wire bonder, the wire guide module comprising:
- a body made of a thermally stable metallic and/or ceramic material;
- an elongated wire feed-through channel provided in the body, the wire feed-through channel having a wire inlet opening and a wire outlet opening;
- and
- a guide tube arranged in the wire feed-through channel,
- wherein, with respect to a feed-through direction of a bond wire in the wire feed-through channel, a downstream distal end of the guide tube terminates upstream of the wire outlet opening,
- wherein an inert gas channel having an inert gas inlet opening is provided in the body for feeding an inert gas, and
- wherein the guide tube has a through opening on a lateral surface, and wherein the guide tube is arranged in the wire feed-through channel and associated with the inert gas channel such that inert gas fed through the inert gas channel enters the guide tube through the through opening.
An ultrasonic wire bonder comprising:
- a linearly and/or rotationally movable bonding head, wherein a bonding tool that is adapted to be excited into ultrasonic vibrations via an ultrasonic transducer is replaceably held on the bonding head;
- a thermal generator for heating the bonding tool and/or the bond wire and/or a substrate;
- and
- a wire guide module that is formed as part of the bonding head for feeding the bond wire to the bonding tool,
- wherein the wire guide module comprises:
- a body made of a thermally stable metallic and/or ceramic material;
- an elongated wire feed-through channel provided in the body, the wire feed-through channel having a wire inlet opening and a wire outlet opening;
- and
- a guide tube arranged in the wire feed-through channel,
- wherein, with respect to a feed-through direction of a bond wire in the wire feed-through channel, a downstream distal end of the guide tube terminates upstream of the wire outlet opening,
- wherein the bonding tool is provided in addition to the wire quide module, and
- wherein, from the wire inlet opening to the wire outlet opening, the wire feed-through channel is configured so as to circumferentially surround the bond wire.
Dependencies are inferred from the claim text.