Saw module, flavor inhaler, and method for manufacturing saw module
AssigneeJapan Tobacco Inc.
InventorYuki Abe
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Abstract
A surface acoustic wave module (SAW module) includes a piezoelectric element substrate including a piezoelectric body, an IDT disposed on a front surface of the piezoelectric element substrate and including a comb-like electrode pair, and a coating layer covering the piezoelectric element substrate and the IDT. The coating layer is disposed on the front surface of the piezoelectric element substrate, an end surface of the piezoelectric element substrate, and a corner portion between the front surface of the piezoelectric element substrate and the end surface of the piezoelectric element substrate.
Claims8
A SAW module comprising:
- a piezoelectric element substrate including a piezoelectric body;
- an Interdigital Transducer (IDT), disposed on a front surface of the piezoelectric element substrate and comprising a comb-like electrode pair;
- a coating layer covering the piezoelectric element substrate and the IDT, wherein the coating layer is disposed on the front surface of the piezoelectric element substrate, an end surface of the piezoelectric element substrate, and a corner portion between the front surface of the piezoelectric element substrate and the end surface of the piezoelectric element substrate;
- and
- wherein, on the end surface of the piezoelectric element substrate, the coating layer has a thickness of 600 nm or more and 50% or more of a thickness of the coating layer on the front surface of the piezoelectric element substrate.
A method for manufacturing a SAW module, comprising the steps of
- forming a plurality of IDTs comprising a comb-like electrode pair on a front surface of a wafer of a piezoelectric element substrate including a piezoelectric body;
- cutting the wafer into module units;
- forming a coating layer covering the piezoelectric element substrate that is cut and the IDTs, wherein forming the coating layer forms the coating layer on a front surface of the piezoelectric element substrate, an end surface of the piezoelectric element substrate, and a corner portion between the front surface of the piezoelectric element substrate and the end surface of the piezoelectric element substrate;
- and
- wherein, on the end surface of the piezoelectric element substrate, the coating layer has a thickness of 600 nm or more and 50% or more of a thickness of the coating layer on the front surface of the piezoelectric element substrate.
Dependencies are inferred from the claim text.