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US 12,525,950 B2Granted
Acoustic wave resonator with rotated and tilted interdigital transducer electrode
AssigneeSkyworks Solutions, Inc.
InventorsGong Bin Tang, Rei Goto
Life of this patent
Estimating the term…
Abstract
Acoustic wave resonators are disclosed that include a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer. The interdigital transducer electrode has a rotation angle and a tilt angle. The rotation angle and the tilt angle can together increase a figure of merit of the acoustic wave device. The rotation angle and the tilt angle can both be non-zero.
Claims18
An acoustic wave resonator comprising:
- a piezoelectric layer;
- and
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a rotation angle and a tilt angle, the rotation angle and the tilt angle both being non-zero, the rotation angle being greater than the tilt angle, a magnitude of the rotation angle being greater than 1°, and a figure of merit of acoustic wave resonator being above 140.
An acoustic wave resonator comprising:
- a multilayer piezoelectric substrate including a support substrate and a piezoelectric layer over the support substrate;
- and
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a rotation angle and a tilt angle, the rotation angle and the tilt angle both being non-zero, the rotation angle being greater than the tilt angle, a magnitude of the rotation angle being greater than 1°, and a figure of merit of acoustic wave resonator being above 140.
An acoustic wave filter comprising:
- a first acoustic wave resonator including a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a rotation angle and a tilt angle, the rotation angle and the tilt angle both being non-zero, the rotation angle being greater than the tilt angle, a magnitude of the rotation angle being greater than 1°, and a figure of merit of acoustic wave resonator being above 140;
- and
- a plurality of other acoustic wave resonators, the first acoustic wave resonator and the plurality of other acoustic wave resonators together arranged to filter a radio frequency signal.
Dependencies are inferred from the claim text.