Motor control method, transfer device, and storing medium

A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, the motor control method comprising:

• a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor;
• and
• a transfer process of transferring the object to be transferred by controlling current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor,
• wherein the data acquisition process comprises:
• a process of acquiring pieces of accumulation correspondence data corresponding to an accumulated value of the pieces of drive data;
• and
• a process of acquiring an amount of the displacement based on the pieces of accumulation correspondence data, and
• wherein the transfer process includes a process of controlling the current to be supplied to the motor based on the acquired amount of the displacement.

A transfer device including a transfer mechanism used in a substrate processing apparatus and configured to transfer an object to be transferred by driving of a motor, the transfer device comprising:

• a data acquirer configured to acquire, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor;
• a current supplier configured to control current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor;
• and
• a moving object configured to move with the driving of the motor so as to transfer the object to be transferred,
• wherein the data acquirer acquires the pieces of drive data multiple times in each of a first duration and a second duration after the first duration, and includes an accumulation correspondence data acquirer configured to acquire pieces of accumulation correspondence data that correspond to an accumulated value obtained by accumulating the pieces of drive data in each of the first duration and the second duration, and
• wherein the current supplier controls the current to be supplied to the motor based on each of the pieces of accumulation correspondence data.

A transfer device including a transfer mechanism used in a substrate processing apparatus and configured to transfer an object to be transferred by driving of a motor, the transfer device comprising:

• a data acquirer configured to acquire, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor;
• a current supplier configured to control current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor;
• a moving object configured to move with the driving of the motor so as to transfer the object to be transferred;
• and
• a displacement amount acquirer configured to acquire an amount of the displacement based on pieces of accumulation correspondence data corresponding to an accumulated value of the pieces of drive data acquired by the data acquirer,
• wherein the current supplier controls the current to be supplied to the motor based on the acquired amount of the displacement.