US 12,525,883 B2Granted

DC high-voltage source device including plurality of variable DC voltage sources and plurality of switching circuits, and charged particle beam device including the DC high-voltage source device

AssigneeHitachi High-Tech Corporation

InventorTomoyo Sasaki

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Abstract

A DC high-voltage source device includes a first voltage source including first and second variable DC voltage sources; first and second switching circuits that generate an AC voltage from the DC voltage of the first and second variable DC voltage sources, respectively; a first transformer that transforms the AC voltage generated by the first switching circuit; a second transformer that transforms the AC voltage generated by the second switching circuit; a DC high-voltage generation circuit that generates a DC high voltage based on a transformed AC voltage supplied from the first transformer and a transformed AC voltage supplied from the second transformer. A computer system independently adjusts the DC voltage value of the first variable DC voltage source, the DC voltage value of the second variable DC voltage source, the switching timing of the first switching circuit, and the switching timing of the second switching circuit.

Claims16

Dependent claims

A DC high-voltage source device comprising:

a first voltage source including
a first variable DC voltage source,
a second variable DC voltage source,
a first switching circuit that generates an AC voltage from a DC voltage of the first variable DC voltage source,
a second switching circuit that generates an AC voltage from a DC voltage of the second variable DC voltage source,
a DC high-voltage generation circuit that generates a DC high voltage based on the AC voltage generated by the first switching circuit and the AC voltage generated by the second switching circuit;
and
a computer system, wherein
the computer system independently adjusts a voltage value of the DC voltage of the first variable DC voltage source, a voltage value of the DC voltage of the second variable DC voltage source, a switching timing of the first switching circuit, and a switching timing of the second switching circuit,
the computer system includes a digital multiplier, a first digital-to-analog converter corresponding to the first variable DC voltage source, and a second digital-to-analog converter corresponding to the second variable DC voltage source,
the first digital-to-analog converter converts a control signal for defining a voltage of the first variable DC voltage source into an analog signal and supplies the analog signal to the first variable DC voltage source to adjust the voltage of the first variable DC voltage source,
the digital multiplier multiplies the control signal by a voltage adjustment ratio that indicates a ratio of a voltage of the second variable DC voltage source to the first variable DC voltage source, and
the second digital-to-analog converter converts the multiplied value of the digital multiplier into an analog signal and supplies the analog signal to the second variable DC voltage source to adjust the voltage of the second variable DC voltage source.

10 more elements

A DC high-voltage source device comprising:

a first voltage source including
a first variable DC voltage source,
a second variable DC voltage source,
a first switching circuit that generates an AC voltage from a DC voltage of the first variable DC voltage source,
a second switching circuit that generates an AC voltage from a DC voltage of the second variable DC voltage source,
a DC high-voltage generation circuit that generates a DC high voltage based on the AC voltage generated by the first switching circuit and the AC voltage generated by the second switching circuit;
and
a computer system, wherein
the computer system independently adjusts a voltage value of the DC voltage of the first variable DC voltage source, a voltage value of the DC voltage of the second variable DC voltage source, a switching timing of the first switching circuit, and a switching timing of the second switching circuit,
the DC high-voltage generation circuit is a two-input symmetrical Cockcroft-Walton circuit to which the AC voltage generated by the first switching circuit and the AC voltage generated by the second switching circuit are input, and
the DC high-voltage generation circuit is configured with a plurality of diodes and a plurality of capacitors, and a first circuit configuration between a first input terminal on the first switching circuit side and an output terminal is symmetric with a second circuit configuration between a second input terminal on the second switching circuit side and the output terminal.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application: 18/016,989Filed 22 Jul 2020
Published: US 2023/0353056 A12 Nov 2023
Granted: 13 Jan 2026
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

H02M 3/28
By static converters: using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
H02M 7/103
Arranged for operation in series, e.g. for multiplication of voltage: containing passive elements which are ordered in cascade on one source
H01J 37/248
Details: components associated with high voltage supply
H02M 1/0043
Details of apparatus for conversion: converters switched with a phase shift, i.e. interleaved