Surface-emitting laser element and surface-emitting laser element manufacturing method

A manufacturing method for a surface-emitting laser element made of a group-3 nitride semiconductor, the manufacturing method comprising:

• forming a guide layer on a c plane of the group-3 nitride semiconductor;
• forming an etching mask on the guide layer, the etching mask having an opening set including at least a main opening and a sub-opening smaller in size than the main opening at each square lattice point;
• forming a main hole and a sub-hole by etching the guide layer using the etching mask;
• forming an embedding layer that closes openings of the main hole and the sub-hole by performing crystal growth including mass transport, to form a multiple lattice photonic crystal layer in which an air hole set including a main air hole and a sub-air hole smaller in air hole diameter and depth than the main air hole is arranged at each square lattice point;
• and
• forming a semiconductor layer including an active layer on the multiple lattice photonic crystal layer,
• wherein the main air hole has a regular-hexagonal prism shape, a long-hexagonal prism shape, or an elliptic cylindrical shape with a major axis parallel to a <11-20> axis.

A surface-emitting laser element made of a group-3 nitride semiconductor, the surface-emitting laser element comprising:

• a first guide layer including a photonic crystal layer that is formed on a c plane of the group-3 nitride semiconductor and includes air holes arranged with two-dimensional periodicity in a plane parallel to the photonic crystal layer, and an embedding layer that is formed on the photonic crystal layer and closes the air holes;
• an active layer formed on the first guide layer;
• and
• a second guide layer formed on the active layer,
• wherein an air hole set including at least a main air hole and a sub-air hole smaller in air hole diameter and depth than the main air hole is arranged at each square lattice point in the plane parallel to the photonic crystal layer, and
• wherein the main air hole and the sub-air hole each have a regular-hexagonal prism shape with a major axis parallel to a <11-20> axis.