Plasma processing apparatus and storage medium

A non-transitory computer-readable storage medium having stored therein a program to be executed by an information processing device that controls a plasma processing apparatus including:

• an electrostatic chuck accommodated in a plasma processing chamber, including an electrostatic electrode, and configured to adsorb a substrate by a voltage supplied to the electrostatic electrode;
• a DC power supply configured to supply the voltage to the electrostatic electrode;
• a relay circuit provided in a power supply line between the DC power supply and the electrostatic electrode and configured to turn ON and OFF the supply of the voltage to the electrostatic electrode;
• and
• a plasma generator configured to generate a plasma inside the plasma processing chamber, wherein the plasma generator is an RF power supply,
• wherein the program causes the information processing device to execute a process including:
• (a) controlling the DC power supply to supply the voltage to the electrostatic electrode, thereby adsorbing the substrate to an upper surface of the electrostatic chuck;
• (b) after the voltage supplied to the electrostatic electrode is stabilized, controlling the relay circuit to turn OFF the supply of the voltage to the electrostatic electrode, thereby bringing the electrostatic electrode into a floating state;
• (c) after the voltage supplied to the electrostatic electrode is stabilized, controlling the plasma generator to start a plasma processing of the substrate adsorbed to the electrostatic chuck;
• (d) after the plasma processing of the substrate is started, controlling the relay circuit to turn ON the supply of the voltage to the electrostatic electrode, thereby acquiring current flowing through the power supply line when the voltage is supplied to the electrostatic electrode;
• and
• (e) determining an adsorbed state of the substrate based on the current,
• wherein in (e):
• the plasma processing of the substrate is stopped based on a determined result of the adsorbed state of the substrate, or
• a prompt signal is displayed, the prompt signal being for replacing the relay circuit based on the determined result of the adsorbed state of the substrate.