Method for making a magnetic recording head with a piezoelectric actuator for controlling head-media spacing

A method for making a magnetic recording head, the magnetic recording head comprising a piezoelectric actuator for controlling head-media spacing, the method comprising the steps of:

• providing a source wafer on which to fabricate the piezoelectric actuator;
• providing a sacrificial layer on the source wafer;
• providing a target wafer;
• fabricating the piezoelectric actuator on the source wafer;
• depositing a tether layer on the piezoelectric actuator;
• pattering tethers in the tether layer, the tethers configured to bind the piezoelectric actuator to the source wafer after removing the sacrificial layer;
• removing the sacrificial layer with an etch process such that a gap remains between the piezoelectric actuator and the source wafer, and the piezoelectric actuator is bound to the source wafer by the tethers;
• contacting a surface of the tether layer with a stamp such that the tether layer becomes coupled to the stamp;
• applying a force to the stamp such that the tethers are broken and the piezoelectric actuator is lifted from the source wafer;
• and
• placing the piezoelectric actuator on the target wafer.

A method for making a magnetic recording head, the magnetic recording head comprising a piezoelectric actuator for controlling head-media spacing, the method comprising the steps of:

• providing a source wafer on which to fabricate the piezoelectric actuator;
• providing a target wafer;
• providing a sacrificial layer on the source wafer;
• depositing one or more piezoelectric layers and one or more electrodes on the source wafer;
• patterning the one or more piezoelectric layers to segregate and define the piezoelectric actuator;
• releasing the piezoelectric actuator from the source wafer;
• and
• placing the piezoelectric actuator on the target wafer.