Determination method, determination apparatus, information processing method, storage medium, information processing apparatus, lithographic apparatus, and method for manufacturing article

A determination apparatus comprising:

• one or more processors that operate to determine an abnormality based on relative positions between substrates corresponding to a plurality of respective measurements and a conveyor,
• wherein the one or more processors operate to perform operations including:
• measuring first relative positions that are the relative positions between the substrates corresponding to the plurality of respective measurement positions and the conveyor when the conveyor moves to the plurality of respective measurement positions, each substrate of the substrates being disposed at a respective measurement position of the plurality of measurement positions,
• measuring second relative positions that are the relative positions between the substrates corresponding to the plurality of respective measurement positions and the conveyor when the conveyor moves to the plurality of respective measurement positions after the first relative positions are measured, and
• determining presence or absence of an abnormality in the conveyor and presence or absence of an abnormality in a floor at one measurement position of the plurality of respective measurement positions based on the measurement results of the first and second relative positions.

An information processing method comprising:

• obtaining measurement results of first relative positions that are relative positions between substrates corresponding to a plurality of respective measurement positions and a conveyor when the conveyor moves to the plurality of respective measurement positions, each substrate of the substrates being disposed at a respective measurement position of the plurality of measurement positions;
• obtaining measurement results of second relative positions that are the relative positions between the substrates corresponding to the plurality of respective measurement positions and the conveyor when the conveyor moves to the plurality of respective measurement positions after the first relative positions are measured;
• and
• determining presence or absence of an abnormality in the conveyor and presence or absence of an abnormality in a floor at one measurement position of the plurality of respective measurement positions based on the obtained measurement results of the first and second relative positions.

An information processing apparatus comprising:

• one or more sensors that operate to obtain relative positions between substrates corresponding to a plurality of respective measurement positions and a conveyor;
• and
• one or more processors that operate to determine an abnormality based on information obtained by the one or more sensors,
• wherein the one or more sensors operate to obtain measurement results of first relative positions that are the relative positions between the substrates corresponding to the plurality of respective measurement positions and the conveyor when the conveyor moves to the plurality of respective measurement positions, each substrate of the substrates being disposed at a respective measurement position of the plurality of measurement positions,
• wherein the one or more sensors further operate to obtain measurement results of second relative positions that are the relative positions between the substrates corresponding to the plurality of respective measurement positions and the conveyor when the conveyor moves to the plurality of respective measurement positions after the first relative positions are measured, and
• wherein the one or more processors operate to determine presence or absence of an abnormality in the conveyor and presence or absence of an abnormality in a floor at one measurement position of the plurality of respective measurement positions based on the measurement results of the first and second relative positions obtained by the one or more sensors.

A method for manufacturing an article, the method comprising:

• forming a pattern on a substrate conveyed by a conveyor;
• manufacturing the article with the patterned substrate;
• measuring first relative positions as a first measurement, wherein the first relative positions are relative positions between substrates corresponding to a plurality of respective measurement positions and the conveyor when the conveyor moves to the plurality of respective measurement positions, each substrate of the substrates being disposed at a respective measurement position of the plurality of measurement positions;
• measuring second relative positions as a second measurement, wherein the second relative positions are the relative positions between the substrates corresponding to the plurality of respective measurement positions and the conveyor when the conveyor moves to the plurality of respective measurement positions after the first measurement;
• and
• determining presence or absence of an abnormality in the conveyor and presence or absence of an abnormality in a floor at one measurement position of the plurality of respective measurement positions as a determination based on measurement results of the first and second measurements,
• wherein the substrate is one of the substrates.