Apparatus and method for calibrating a fluid dispenser
AssigneeCanon Kabushiki Kaisha
InventorsQi Ni, James W. Irving, Ahmed M. Hussein, Craig William Cone
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AssigneeCanon Kabushiki Kaisha
InventorsQi Ni, James W. Irving, Ahmed M. Hussein, Craig William Cone
Estimating the term…
Systems and methods are provided for adjusting a fluid dispenser for depositing drops of formable material. According to embodiments, a system obtains an image of a substrate including a film formed on the substrate by curing the formable material deposited by a first dispenser and a second dispenser. Intensity information is obtained for pixels of the image and a difference is determined between intensity values from a portion of the substrate on which the first dispenser deposited drops and intensity values from a portion on which the second dispenser deposited drops, the intensity values corresponding to a region of the substrate associated with a target thickness. Adjustments based on the intensity values are made to change a drop volume and a drop density for nozzles of the first dispenser and nozzles of the second dispenser.
A method comprising:
A system comprising:
Dependencies are inferred from the claim text.