Electrostatic MEMS micromirror

A micromirror array comprising

• a plurality of electrostatic MEMS micromirrors arranged in an array manner, each of the plurality of electrostatic MEMS micromirrors comprising:
• a drive component, the drive component comprises a comb frame and a drive comb located in the comb frame;
• a support beam;
• and
• a micromirror,
• wherein the support beam and the micromirror are mechanically coupled by using the comb frame, and two sides of the comb frame that are mechanically coupled to the micromirror are separately located on two sides of a rotating axis determined by the support beam,
• wherein the drive comb comprises at least one comb pair, the comb pair comprises a movable comb structure and a stationary comb structure, the movable comb structure comprises a plurality of movable combs, one end of the movable comb is fastened to the comb frame, and the stationary comb structure is configured to generate electrostatic force with the movable comb structure;
• and
• wherein a distance between a fixed end of the movable comb and the rotating axis is greater than a distance between the other end of the movable comb and the rotating axis.

An optical switch comprising

• an input port array;
• an output port array;
• and
• a micromirror array, the input port array is configured to receive an optical signal, and the optical signal is output through the output port array after being reflected by the micromirror array, the micromirror array comprising a plurality of electrostatic MEMS micromirrors arranged in an array manner, each of the plurality of electrostatic MEMS micromirrors comprising:
• a drive component, the drive component comprises a comb frame and a drive comb located in the comb frame;
• a support beam;
• and
• a micromirror,
• wherein the support beam and the micromirror are mechanically coupled by using the comb frame, and two sides of the comb frame that are mechanically coupled to the micromirror are separately located on two sides of a rotating axis determined by the support beam,
• wherein the drive comb comprises at least one comb pair, the comb pair comprises a movable comb structure and a stationary comb structure, the movable comb structure comprises a plurality of movable combs, one end of the movable comb is fastened to the comb frame, and the stationary comb structure is configured to generate electrostatic force with the movable comb structure, and
• wherein a distance between a fixed end of the movable comb and the rotating axis is greater than a distance between the other end of the movable comb and the rotating axis.

An optical device comprising:

• a controller;
• and
• an electrostatic MEMS micromirror, wherein the electrostatic MEMS micromirror comprises:
• a support beam, a micromirror, and a drive component, wherein
• the drive component comprises a comb frame and a drive comb located in the comb frame;
• the support beam and the micromirror are mechanically coupled by using the comb frame, and two sides of the comb frame that are mechanically coupled to the micromirror are separately located on two sides of a rotating axis determined by the support beam;
• wherein the drive comb comprises at least one comb pair, the comb pair comprises a movable comb structure and a stationary comb structure, the movable comb structure comprises a plurality of movable combs, one end of the movable comb is fastened to the comb frame, and the stationary comb structure is configured to generate electrostatic force with the movable comb structure;
• and
• wherein a distance between a fixed end of the movable comb and the rotating axis is greater than a distance between the other end of the movable comb and the rotating axis.