Power device threshold voltage measurement circuit and operation method thereof

An operation method of a power device threshold voltage measurement circuit, wherein the power device threshold voltage measurement circuit includes a switch component, a device under test, a common source capacitor and a decoupling capacitor, the switch component includes a first terminal for receiving an input voltage, a second terminal for receiving a first driving voltage and a third terminal, the device under test includes a first terminal which is being electrically to the third terminal of the switch component, a second terminal for receiving a second driving voltage and a third terminal, the common source capacitor is electrically connected in series with the device under test and electrically connected between the third terminal of the device under test and a ground, and the decoupling capacitor is electrically connected in parallel with the device under test and the common source capacitor and electrically connected between the first terminal of the device under test and the ground, the operation method of the power device threshold voltage measurement circuit comprising:

• applying an OFF-state stress mode, in which a high-level voltage is provided across the second terminal and the third terminal of the switch component, and the second driving voltage provided to the device under test is zero;
• and
• applying a measurement mode which is successively after the OFF-state stress mode, wherein in the measurement mode, a high-level voltage is provided both across the second terminal and the third terminal of the switch component and to the second driving voltage for inputting to the device under test, so as to measure a threshold voltage of the device under test.