Inspection system

An inspection system including multiple inspection units configured to inspect substrates,

• wherein each of the inspection units includes:
• a tester configured to inspect a substrate;
• a moving part configured to hold and move the substrate relative to the tester;
• and
• a frame structure configured to accommodate the tester and the moving part,
• wherein the frame structure of one inspection unit includes:
• a first frame to be connected to a frame structure of another inspection unit;
• and
• a second frame that accommodates at least the moving part and is configured to move relative to the first frame to extract the moving part from the first frame,
• wherein the first frame has a tester space accommodating the tester and a second frame space accommodating the second frame,
• wherein the tester has a tester-side interface that projects from the tester space toward the second frame space and is brought into contact with the substrate transferred by the moving part, and
• the first frame has a tester moving mechanism configured to move the tester in a height direction, and the tester-side interface is disposed in the tester space by the movement of the tester.