Thermal conductivity vacuum gauge and thermal compensation assembly
AssigneeEdwards Limited
InventorsGary Michael George Lord, Matthew Gareth Key, Nicholas Daniel Hutton, Glen Croft
Life of this patent
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Abstract
The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element is enclosed within the wall between the outer and inner facing wall surfaces. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.
Claims13
A thermal conductivity vacuum gauge assembly comprising:
- a body defining an internal chamber for receiving working gas, wherein the body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface;
- a heater element disposed within the chamber;
- a thermal compensation element enclosed within the wall between the outer and inner facing wall surfaces;
- and
- a printed circuit board that the thermal compensation element is mounted to, wherein a first portion of the printed circuit board is enclosed within the wall between the outer and inner facing wall surfaces and a second portion of the printed circuit board protrudes out from the wall.
Dependencies are inferred from the claim text.