Piezoelectric MEMS acoustic sensor

A piezoelectric micro-electromechanical system (MEMS) acoustic sensor, comprising:

• a substrate, an inner electrode area, and an outer electrode area,
• wherein the inner electrode area and the outer electrode area both comprise a top electrode, an upper piezoelectric layer, a middle electrode, a lower piezoelectric layer and a bottom electrode stacked from top to bottom, the top electrode, the middle electrode, and the bottom electrode in the inner electrode area are spaced from the top electrode, the middle electrode and the bottom electrode in the outer electrode area correspondingly, and a lower support layer is disposed on a top of the substrate, both the inner electrode area and the outer electrode area are disposed on the lower support layer, and an upper support layer is disposed on both a top surface of the inner electrode area and the outer electrode area;
• wherein a plurality of electrode connection grooves (14) are configured on a surface of the upper support layer (5) for connecting the top electrode, the middle electrode, and the bottom electrode, respectively, and the plurality of electrode connection grooves (14) are disposed on an area of the upper support layer (5) outer than where the inner electrode area (13) and the outer electrode area (12) are located.