Measurement apparatus, measurement system, substrate processing apparatus, and measurement method

A measurement system comprising:

• A multiplexer configured to selectively output one ray of light from rays of light emitted by phosphors and switch the output light in response to an input of a switching instruction signal, wherein the phosphors are provided at positions of a plurality of measurement targets, respectively, each ray of light is emitted according to a temperature of each of the plurality of measurement targets, and the switching instruction signal instructs switching from the light of the phosphor provided in one of the plurality of measurement targets to the light of the phosphor provided in another one of the plurality of measurement targets;
• and
• A measurement apparatus including:
• An input part into which the light output from the multiplexer is input;
• A measurement part configured to measure the temperature of one of the plurality of measurement targets from the light input to the input part and generate, at a time at which the measurement of the temperature of one of the plurality of measurement targets is completed, the switching instruction signal;
• and
• An output part configured to output the switching instruction signal generated by the measurement part, wherein
• the measurement of the temperature of one of the plurality of measurement targets comprises turning on a light source to irradiate a phosphor provided in one of the plurality of measurement targets with light and measuring a time until an amount of light of the phosphor provided in one of the plurality of measurement targets is attenuated to a predetermined level after the light source is turned off, and generate, at a time at which the temperature measurement of one of the plurality of measurement targets is completed, the switching instruction signal instructing the switching of the multiplexer.

A substrate processing apparatus comprising:

• phosphors provided at positions, respectively, which are a plurality of measurement targets of a temperature of the substrate processing apparatus;
• first optical fibers each configured to transmit light emitted by the phosphors;
• a multiplexer connected to the first optical fibers and configured to selectively output one ray of light to a second optical fiber from rays of light transmitted via the first optical fibers, and configured to switch the light output to the second optical fiber according to an input of a switching instruction signal indicating switching from the light of the phosphor provided in one of the plurality of measurement targets to the light of the phosphor provided in another one of the plurality of measurement targets;
• and
• a measurement apparatus including:
• an input part connected to the second optical fiber and into which the light output from the multiplexer is input;
• a measurement part including a light source, configured to measure a temperature of one of the plurality of measurement targets by turning on the light source to irradiate the phosphor provided in one of the plurality of measurement targets with light via the first optical fiber and the second optical fiber and measuring a time until an amount of the light of the phosphor provided in one of the plurality of measurement targets input via the first optical fiber and the second optical fiber is attenuated to a predetermined level after the light source is turned off, and configured to generate, at a time at which the temperature measurement of one of the plurality of measurement targets is completed, the switching instruction signal;
• and
• an output part configured to output the switching instruction signal generated by the measurement part.

A measurement method comprising:

• measuring a temperature of one of a plurality of measurement targets from light emitted by each of phosphors, wherein the phosphors are provided at positions of the plurality of measurement targets, respectively, and each ray of light is emitted according to a temperature of each of the plurality of measurement targets and input to an input part;
• generating, at a time at which the measuring the temperature of one of the plurality of measurement targets is completed, a switching instruction signal instructing switching of a multiplexer, which is configured to selectively output one ray of light from rays of light emitted by the phosphors, from the light of the phosphor provided in one of the plurality of measurement targets to the light of the phosphor provided in another one of the plurality of measurement targets;
• and
• outputting the generated switching instruction signal.